A kind of shading plate and its preparation method and application
A technology of shading plate and exposure machine, which is applied in the direction of microlithography exposure equipment, photolithography exposure device, etc., which can solve the problems of affecting the uniformity of product line width, affecting product quality, and uneven energy of ultraviolet light irradiation, so as to achieve production The cost is not high, the response time is short, and the effect of avoiding the opening and closing time
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[0042] The following descriptions are preferred implementations of the embodiments of the present invention. It should be pointed out that those skilled in the art can make some improvements and modifications without departing from the principles of the embodiments of the present invention. These improvements And retouching are also regarded as the scope of protection of the embodiments of the present invention.
[0043] see figure 1 , the preparation method of a kind of shading plate provided for the implementation of the present invention, comprises the steps:
[0044] Step S101: providing an anode transparent substrate and a cathode transparent substrate, depositing an anode transparent conductive layer on one side of the anode transparent substrate, depositing a cathode transparent conductive layer on one side of the cathode transparent substrate, and depositing a cathode transparent conductive layer on one side of the anode transparent conductive layer An anode electroch...
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Abstract
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