Preparation method and preparation device of mask plate and mask plate
A technology for preparing devices and mask plates, which is applied in the fields of mask plate preparation, mask plates, and preparation devices. It can solve the problems of easy wrinkles in FMM, poor evaporation effect, and poor evaporation products, so as to improve the efficiency of evaporation. Effect, high flatness, high quality effect
Active Publication Date: 2018-10-16
BOE TECH GRP CO LTD +1
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Problems solved by technology
[0003] The method of LTPS backplane + fine metal mask (FMM) means that the OLED material is evaporated onto the LTPS backplane according to a predetermined procedure by evaporation, and the graphics on the FMM are used to form red, green and blue light-emitting devices; in this process Among them, the quality of FMM is one of the important factors affecting the evaporation effect. At present, the common problem is that FMM is prone to wrinkles, which leads to poor evaporation effect and poor evaporation products.
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[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0031] Please refer to Figure 1 to Figure 3 .
[0032] Such as Figure 1 to Figure 3 As shown, the embodiment of the present invention provides a method for preparing a mask, including:
[0033] Step S101, placing the mask frame 2 on the bearing surface 10 of the machine 1;
[0034] In step S103 , a pressing mechanism 3 is provided, the pressing surface 30 of the pressing mechanism 3 is opposed to the bearing surface 10 of the machine 1 , and the pressing ...
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The invention relates to the technical field of evaporation, and discloses a preparation method and a preparation device of a mask plate and the mask plate. The preparation method of the mask plate comprises the following steps: a mask plate frame is placed on a bearing surface of a stand; a pressing mechanism is provided; a pressing surface of the pressing mechanism is opposite to a bearing surface of the stand; and the pressing mechanism is driven to press towards the bearing surface. In the preparation method of the mask plate, the pressing mechanism is adopted to press the mask plate frameon the bearing surface, so that the flatness of the mask plate frame can be guaranteed, the mask plate frame can be prevented from generating drapes, the quality of the mask plate can be guaranteed,and the evaporation effect and the yield of evaporation products are improved.
Description
technical field [0001] The invention relates to the technical field of vapor deposition, in particular to a method for preparing a mask, a preparation device and the mask. Background technique [0002] Organic electroluminescent display (OLED display) has the advantages of light and thin, low power consumption, high contrast, high color gamut, and flexible display, and is the development trend of the next generation of display. OLED display includes active matrix organic light emitting diode display (AMOLED) and passive matrix organic light emitting diode display (PMOLED). Among them, AMOLED display is realized by low temperature polysilicon backplane (LTPS backplane) + fine metal mask (FMM) , and metal oxide backplane (Oxid backplane) + white OLED (WOLED) + color film, the former is mainly used in small-sized panels, corresponding to mobile phones and mobile applications; the latter is mainly used in large-sized panels, corresponding to monitors (Monitor ) and TV applicati...
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IPC IPC(8): C23C14/04C23C14/24H01L51/56
CPCC23C14/042C23C14/24H10K71/164H10K71/166
Inventor 赵蓉张新建张健吕守华
Owner BOE TECH GRP CO LTD