Wideband bidirectional wide-angle absorbing structure and preparation method thereof

A wave structure and wide-angle technology, applied in the field of broadband bidirectional wide-angle wave absorbing structure and its preparation, can solve problems such as working band limitation, and achieve the effects of low preparation cost, simple design, convenient and rapid mass production

Inactive Publication Date: 2018-11-02
SUZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example, the patent with the authorized notification number CN105480931B [A Visible Light Two-way Absorber Structure] discloses a two-way visible light wide-band absorber, which is formed by covering a metal layer and a dielectric layer with a two-dimensional nanostructure. And the average absorption efficiency below is less than 90%, but the working band is limited to the visible band

Method used

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  • Wideband bidirectional wide-angle absorbing structure and preparation method thereof
  • Wideband bidirectional wide-angle absorbing structure and preparation method thereof
  • Wideband bidirectional wide-angle absorbing structure and preparation method thereof

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Effect test

Embodiment 1

[0043] see figure 1 , the ultra-broadband bidirectional wide-angle wave absorbing structure of the present invention comprises a moth-eye nanostructure array, and the moth-eye nanostructure array is formed on the upper surface of the substrate 30, and the material of the substrate 30 is PET, PMMA, quartz, UV resin, polycarbonate or GaAs .

[0044] The upper surface of the moth-eye nanostructure array junction is covered with a metal layer 20, and the material of the metal layer 20 can be selected from metals such as nickel, chromium, and titanium. The moth-eye nanostructure array is composed of several quasi-periodic moth-eye nanostructures 10. In the horizontal direction, the width of the end of the moth-eye nanostructure 10 close to the metal layer 20 is smaller than the width of the end away from the metal layer 20 (that is, the width at the bottom and the width at the top). ratio greater than 1:1), see figure 1 , moth-eye nanostructures have various shapes, such as nanos...

Embodiment 2

[0047] The ultra-broadband bidirectional wide-angle wave-absorbing structure of the present invention has a high wave-absorbing rate for ultraviolet to near-infrared wavebands. In a preferred embodiment of the present invention, the metal layer of the wave absorbing structure adopts metal nickel. The period p of the moth-eye nanostructure array is 350 nm, the duty cycle F is 0.8, the height h of the moth-eye nanostructure array is 1000 nm, and the thickness of the metal layer is 40-100 nm. image 3 is when light is incident from above and below ( image 3 a), the graph of the relationship between the absorbing efficiency and the wavelength of the ultra-broadband bidirectional wide-angle absorbing structure of the present invention ( image 3 b). like image 3 As shown, in the ultraviolet to near-infrared band, the ultra-broadband bidirectional wide-angle wave absorbing structure of the present invention has a wave absorption rate of over 98%, and at specific wavelengths (eg...

Embodiment 3

[0051] In this embodiment, the structural parameters of the ultra-broadband bidirectional wide-angle absorbing structure are: the period p is 250-550 nm, the thickness d of the metal layer is 80 nm, and the ratio (h / p) of the height to the period of the moth-eye nanostructure array is 3, The ratio of the width w of the bottom of the moth-eye nanostructure to the period p is F=0.7.

[0052] Figure 5 a-5b is a graph of the relationship between the period p and the absorption rate of the ultra-broadband bidirectional wide-angle wave absorbing structure of the present invention when light is incident from above and below (the unit of period p in the figure is microns). It can be seen that when incident from above, the period varies in the range of 250-500nm, and the structure obtains high absorption efficiency (>90%) in the wavelength range of 200-3000nm; the period varies in the range of 250-450nm, and the structure is in the range of 1000-1750nm waveband, the absorbing efficie...

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Abstract

The invention relates to a wideband bidirectional wide-angle absorbing structure comprising a moth-eye nanostructure array. The moth-eye structure has a bottom-width-to-top-width ratio greater than 1to 1. The surface of the moth-eye structure is covered with a metal layer. The moth-eye nanostructure array has a period of 200 to 450 nm, a ratio of height to period greater than 2, and a ratio of width to period greater than 0.5. A preparation method of the broadband bidirectional wide-angle absorbing structure comprises the steps of: obtaining a moth-eye nanostructure on a base material by photoetching or replicating anodic aluminum oxide; and depositing metal on the upper surface of the moth-eye nanostructure by evaporation or magnetron sputtering. The structure effectively absorbs electromagnetic waves input from the upper surface and the lower surface, and realizes ultra-wideband bidirectional high-efficiency absorption (>95%) from the ultraviolet band to the near-infrared band, hasnot only a polarization-insensitive characteristic but also good angular tolerance, and can achieve bidirectional absorption efficiency of 90% in a range of + / - 60-degee angle of incidence. The wideband bidirectional wide-angle absorbing structure is simple in structure, low in preparation cost and convenient in large-scale and batch production.

Description

technical field [0001] The invention relates to the technical field of nanostructures, in particular to a broadband bidirectional wide-angle wave absorbing structure and a preparation method thereof. Background technique [0002] After Landy et al. proposed the perfect metamaterial absorber, researchers have proposed many absorbing structures to achieve different absorbing properties for thermal imaging, solar cells, plasma sensors, bolometers, wireless energy transmission and other fields. Such as narrow-band absorption, multi-band absorption, broadband absorption, polarization-insensitive absorption, wide incident angle absorption, adjustable bandwidth absorption, etc. At present, the research on perfect absorption mainly focuses on the GHz, THz and infrared bands. With the continuous improvement of micro-nano preparation technology, researchers gradually turn their attention to the visible and ultraviolet wavelengths, and explore the perfect absorption of ultraviolet to ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/00
CPCG02B5/003G02B5/008
Inventor 申溯胡祖元周云
Owner SUZHOU UNIV
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