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Damping sensitive resonant gas pressure sensor

A gas pressure and resonant technology, applied in the measurement of fluid pressure, measurement of fluid pressure through electromagnetic components, instruments, etc., can solve the problems of poor process stability, inability to detect static signals, and high sensitivity

Active Publication Date: 2018-11-13
ALLWINNER TECH CO LTD
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Problems solved by technology

The advantage is high sensitivity, the disadvantage is that it cannot detect static signals (DC flow), and the process stability is poor

Method used

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  • Damping sensitive resonant gas pressure sensor
  • Damping sensitive resonant gas pressure sensor
  • Damping sensitive resonant gas pressure sensor

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Embodiment Construction

[0030] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0031] It should be noted that when an element is referred to as being “fixed on” or “disposed on” another element, it may be directly on the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly co...

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Abstract

The invention relates to a damping sensitive resonant gas pressure sensor comprising a closed loop control structure and a digital processing system; the closed loop control structure comprises a MEMSresonator, a trans-impedance amplifier and a PI (proportional integral) controller connected in sequence; the digital processing system comprises a buffer, an analog-to-digital converter, a processorand an input / output terminal connected in sequence; the PI controller is connected with the buffer. The resonant gas pressure sensor can realize the resonant amplitude detection technology, is smallin size, low in power, and low in cost; the MEMS resonator works in a gas environment, the vibration state of the MEMS resonator changes with the damping changes when the gas pressure changes, so thegas pressure change can be obtained via detection of the MEMS resonator amplitude; in addition, the amplitude of the resonator serves as the detection quantity, and a relative change amount of which is far greater than resistive and capacitive detection quantity, thus providing a detection sensitivity that is much higher than the resistive and capacitive detection; the damping sensitive resonant gas pressure sensor is simple in a making process.

Description

technical field [0001] The invention relates to pressure sensing technology, in particular to a damping-sensitive resonant gas pressure sensor. Background technique [0002] With the promotion of Internet of Things technology, sensor technology is getting more and more attention. Compared with traditional sensors, MEMS (Micro-Electro-Mechanical System, Micro-Electro-Mechanical System) sensors have the advantages of small size, low power consumption, and low cost, and have a broad market in consumer and industrial fields that do not require high precision. . MEMS pressure sensor is one of the earliest practical MEMS sensors, widely used in industries, automobiles, medicine, mobile phones and other fields. [0003] At present, the mainstream MEMS pressure sensors are divided into two types: piezoresistive and capacitive. [0004] Piezoresistive type: MEMS technology is used to make a closed cavity with a silicon film on the cavity, and ion implantation on the film forms a p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/00
CPCG01L9/0008
Inventor 黄占喜
Owner ALLWINNER TECH CO LTD
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