Rate-dependent hysteresis modeling method for piezoelectric actuator

Abstract

A rate-dependent hysteresis modeling method for a piezoelectric actuator comprises the steps of first introducing a twiddle factor and a rate-dependent amplification factor based on a Bouc-Wen model,and performing further description on the twiddle factor and the rate-dependent amplification factor by use of a second-order system to obtain a rate-dependent hysteresis model; establishing a test system platform, generating sinusoidal signals with different frequencies and a swept-frequency signal as inputs through a signal generator with piezoelectric actuation as an object, supplying power forthe piezoelectric actuator through a power amplifier, and collecting corresponding output signals of the piezoelectric actuator by use of a sensing system; performing identification of the rate-dependent hysteresis model, and identifying a second-order system parameter by use of the swept-frequency signal and the corresponding output signal through a least square method; identifying a static parameter of the rate-dependent hysteresis model by use of the low-frequency sinusoidal signal and the corresponding output signal through a particle swarm algorithm; and fitting a dynamic parameter of the rate-dependent hysteresis model by use of the sinusoidal signals with different frequencies and the corresponding output signal. The rate-dependent hysteresis modeling method for the piezoelectric actuator can simultaneously reflect amplitude-dependent and rate-dependent characteristics of the piezoelectric actuator.

Description

technical field [0001] The invention relates to the technical field of piezoelectric hysteresis modeling, in particular to a rate-dependent hysteresis modeling method of a piezoelectric driver. Background technique [0002] With the development of science and technology in the microscopic field, precision drives are more and more widely used in the fields of bioengineering, microelectronics technology, and precision machining, and these fields have higher and higher requirements for drive precision. Typically, important precision instruments such as scanning electron microscopes, micro-manipulators, and atomic force microscopes require precision drives. Piezoelectric actuators have been widely used in the field of precision driving due to their high resolution, large output force, and high energy density. However, the hysteresis and nonlinear characteristics of piezoelectric actuators lead to a serious loss of drive accuracy. Compensation control, currently commonly used hy...

AI Technical Summary

Problems solved by technology

However, most of the commonly used hysteresis models can reflect the amplitude-dependent characteristics of the hysteresis and cannot reflect the rate-dependent characteristics of the hysteresis. Therefore, there is an urgent need for a hysteresis model that can simultaneously reflect the amplitude-dependent and rate-dependent characteristics of the nonlinear hysteresis of the piezoelectric actuator. Precision control of electric drive provides reliable model

Images