Process for producing light-modulating film
A manufacturing method and technology of dimming film, which are applied in optics, nonlinear optics, ion implantation plating and other directions to achieve the effect of inhibiting oxidation
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Embodiment 1
[0089] In Example 1, a roll-to-roll sputtering apparatus having two film-forming chambers, a first film-forming chamber equipped with a first film-forming roller and a second film-forming chamber equipped with a second film-forming roller, was used on a transparent film substrate. A Mg-Y dimming layer and a Pd catalyst layer are formed on it. The Mg—Y target was arranged to face the first film-forming roll of the sputtering apparatus, and the Pd target was arranged to face the second film-forming roll. As the Mg-Y target, a Mg-Y divided target (manufactured by RARE METALLIC Co., Ltd.) having a Mg metal plate and a Y metal plate at an area ratio of an erosion part of 2:5 was used. As the Pd target, a Pd metal target (manufactured by Tanaka Kikinzoku Co., Ltd.) was used.
[0090] A roll of a polyethylene terephthalate (PET) film (manufactured by Mitsubishi Plastics Corporation, MD with a heat shrinkage rate of 2%) with a thickness of 188 μm is attached to the unwinding roller o...
Embodiment 2、3
[0093] In Example 2 and Example 3, the same roll-to-roll sputtering device as in Example 1 was used, and the Pd target was arranged to face the first film-forming roll, and the Mg-Y target was placed to face the second film-forming roll. , forming a Mg-Y dimming layer and a Pd catalyst layer on a transparent film substrate. A roll of PET film with a thickness of 188 μm is installed on the unwinding roller of the sputtering device, the PET film is sent out from the unwinding roller and moved at 1 m / min in the device, and the discharge from the cathode facing the first film forming roller Closed, on the second film-forming roll, the light-adjusting layer formed of Mg-Y alloy is formed into a film by DC sputtering, and the film is wound up with a take-up roll. Thereafter, under the state of maintaining the vacuum environment, the discharge from the cathode facing the second film-forming roll is turned off, and the discharge from the cathode facing the first film-forming roll is t...
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