SECS/GEM communication method

Abstract

The invention discloses an SECS / GEM communication method. The method comprises an upper-level system and a device control system which communicate with each other directly through an SECS / GEM protocol; the core PLC of the device control system directly exchanges device information with the upper-level system through the SECS / GEM protocol; and the software of the PLC is provided with user program resolution firmware, a self-diagnosis program, a user program, as well as an SECS / GEM protocol configuration program, an SECS / GEM protocol communication program and an SECS / GEM protocol execution program. The hardware cost and software cost of the method provided by the embodiments of the present invention are lower than the cost of the transit architecture of a traditional industrial computer or adedicated transponder. The programmable logic controller-based SECS / GEM communication method has the advantages of simple structure of implementation devices, small communication delay, reduced development difficulty and shortened development cycle.

Description

technical field [0001] The invention relates to a communication method, in particular to a SECS / GEM communication method. Background technique [0002] SECS / GEM is a general communication protocol between upper-level systems and automation equipment in the semiconductor industry. Through this protocol, commands to start or stop equipment, change process parameters, and select recipes can be issued. The SECS / GEM protocol communication program is usually implemented on the on-site industrial computer (PC), and plays the role of a transponder in the device networking function, which requires the design of the underlying programmable logic controller (PLC) of the device to cooperate with the relevant functional interface . This structure will allow the automation equipment to be equipped with a PC, which is a great waste for some simple equipment; on the other hand, the control instructions and process parameters must be transferred through the PC to interact with the equipment...

AI Technical Summary

Problems solved by technology

This structure will allow the automation equipment to be equipped with a PC, which is a great waste for some simple equipment; on the other hand, the control instructions and process parameters must be transferred through the PC to interact with the equipment control PLC, and the communication efficiency is low and the communication delay is high. , its initial import cost is very high, and there is potential instability, which indirectly increases the complexity of the equipment

[0003] Chinese patent (CN201310505310.4) discloses a SECS / GEM message exchange device and method to overcome the defects caused by the communication between the semiconductor automation equipment and the upper system through the EAP system in the prior art

[0004] The above patents still belong to the SECS / GEM communication using transponders, which cannot realize the SECS / GEM direct communication between the upper system and the equipment control system

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