A transfer system for two-dimensional materials

Abstract

The embodiment of the present invention discloses a two-dimensional material transfer system. The system uses an alignment device to detect whether the transfer substrate on the transfer substrate stage is aligned with the target substrate on the target substrate stage. And the alignment detection result is fed back to the main control device, so that the main control device can control the transfer substrate control device to adjust the position of the transfer substrate stage and / or control the target substrate control device to adjust the target substrate according to the alignment detection result. After the transfer substrate is aligned with the target substrate, the two-dimensional material on the transfer substrate is transferred to the target substrate. The two-dimensional material transfer system provided by the embodiment of the present invention can realize the transfer of two-dimensional materials in an intelligent and automatic manner, improve the alignment transfer accuracy of two-dimensional materials, simplify the transfer process of two-dimensional materials, and save The labor cost and the preparation cost of two-dimensional materials are reduced.

Description

Technical field [0001] Example relates to the preparation Technical Field The present invention is a two-dimensional material, and particularly to a system for transferring a two-dimensional material. Background technique [0002] Electronic dimensional material refers to a material freely movable only in two dimensions on a non-nanoscale, i.e., the movement of electrons in a plane. There are many common types of two-dimensional material, such as thin films, superlattice quantum well and the like. Currently, two-dimensional bottom-up and top-down material may be prepared by two methods. [0003] In the bottom-up method for the preparation of a two-dimensional material, a chemical vapor deposition method to prepare large-area dependent on the reaction of certain organic or inorganic precursors on the catalyst substrate, a high-quality two-dimensional material, particularly suitable for electronics or Photonics end applications; and top-down method is prepared based on the correspo...

AI Technical Summary

Problems solved by technology

[0004] However, the traditional dry transfer method requires manual alignment of the transferred material substrate and the target substrate, and the light reflected on the target substrate needs to pass through the transferred material substrate and enter the microscope for observation.

Therefore, when preparing two-dimensional materials, it is necessary to select a transferred material substrate with good light transmission, and the transferred material substrate should have sufficient strength and thinner thickness, which will complicate the preparation process of two-dimensional materials and improve The preparation cost of two-dimensional materials

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