Sensitive element and preparation method of a flexible pressure-temperature integrated thin-film array sensor

Abstract

The invention discloses a flexible pressure-temperature integrated film array sensor sensitive element and a preparation method thereof. The pressure sensing function and the temperature sensing function are integrated by utilizing a piezoelectric effect and a pyroelectric effect of a flexible ferroelectric film, and the sensitive element comprises a flexible substrate, a functional film assemblyand a thermal management film assembly. In the method, an insulating layer and a lower electrode are sequentially deposited on a flexible substrate, a wire is connected, a flexible ferroelectric thinfilm is deposited and an insulating groove is etched, an upper electrode is deposited on the flexible ferroelectric thin film, the wire is connected, a thermal control layer, a thermal conductive layer and an infrared reflective layer are sequentially deposited, and finally the sensitive element is polarized and tested through the wire. The sensitive element of the invention realizes the integration of the pressure sensing function and the temperature sensing function on a single sensitive element, and has high integration level and simple use structure, is suitable for large-area preparation,suitable for plane, curved surface, special-shaped surface and other structures, high adaptability, and has the advantages of shock resistance, strong vibration ability, high bionic degree, high reliability and the like.

Description

technical field [0001] The invention relates to the field of thin film array sensors, in particular to a flexible temperature and pressure integrated thin film array sensor sensitive element and a preparation method. Background technique [0002] With the rapid development of robot technology, various robots such as industrial robots, service robots, entertainment robots and escort robots frequently appear in industrial production and residents' lives. The traditional robot skin only considers the degree of appearance simulation and does not consider the tactile function. In the prior art, a bionic skin of konjac glucomannan robot and its preparation method are introduced. High, good bioavailability, but does not have pressure sensing and temperature sensing functions. [0003] However, with the emergence and use of humanoid robots in recent years, there is a higher demand for the anthropomorphism of robots, both in industrial production and in residential life. For example...

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Problems solved by technology

[0005] At present, the main reasons for restricting the application of the traditional pressure sensor sensor and temperature sensor sensor in the robot touch system are as follows: (1) The principle and structure of the pressure sensor sensor and the temperature sensor sensor are complex and different, making it difficult to Realize integration; (2) Traditional sensitive element materials are generally brittle materials and rigid materials, with low flexibility and easy to be damaged by direct contact, which cannot meet the installation requirements of special-shaped surfaces and the use requirements of repeated touch; (3) Traditional sensitive element materials It is difficult to prepare large-area materials and cannot meet the needs of large-area use; (4) Traditional temperature-sensitive elements, considering their own heat capacity and heating process, have the problem of long response time

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