A three-axis tool servo device based on a compliant parallel mechanism

Abstract

The invention relates to the technical field of nano-positioning, measuring and machining devices, in more particularly to a three-axis cutter servo device based on a compliant parallel mechanism. Thethree-axis cutter servo device comprises outer side fixing bases, an inner side fixing base, uniaxial nano-positioning platforms and a three-axis end actuator, wherein the uniaxial nano-positioning platforms and the three-axis end actuator transfer motion through compliant hinges and flexible rod pieces. The three-axis end actuator is connected with a cutter and provided with a capacitive sensor,and the capacitive sensor is connected with a controller. The output end of the controller is connected with a piezoelectric ceramic driver, the piezoelectric ceramic driver is connected to the inputends of the uniaxial nano-positioning platforms, and the three-axis end actuator is connected to the output ends of the three uniaxial nano-positioning platforms. According to the three-axis cutter servo device based on the compliant parallel mechanism, nanoscale linear displacement of the three-axis end actuator can be output, meanwhile, end output displacement is directly measured through the sensor, feedback control is conducted, and the three-axis cutter servo device has high stiffness, high precision, the high bandwidth, the large stroke, the high speed, high acceleration, the large bearing capacity and excellent decoupling performance.

Description

Technical field [0001] The invention relates to the technical field of nano-positioning, measuring and processing devices, and more specifically, to a three-axis tool servo device based on a compliant parallel mechanism. Background technique [0002] The compliant mechanism is one of the main means to form the main body of the nano-positioning, measuring and processing device. It is a key part of the micro-nano operation, micro-nano measurement and micro-nano processing / manufacturing technology. It plays an important role in related fields. [0003] The compliant hinge utilizes the characteristics of easy deformation of the weak part of the structure and the reversible elastic deformation characteristics of the material itself to realize the required motion pair function, and has the advantages of no assembly, zero clearance, no friction and no lubrication. The compliant mechanism replaces the kinematic pairs of the motion branches of the mechanism with compliant hinges, and conne...

AI Technical Summary

Problems solved by technology

The compliant mechanism designed by the rigid body replacement method can realize the required motion and function, but in some fields with higher precision requirements, the compliant parallel mechanism requires higher stiffness and better motion characteristics. The current compliant parallel mechanism It is difficult for the structure to meet the requirements of high precision, high stiffness, low coupling / full decoupling, large bearing capacity, high speed / acceleration, etc.

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