Automatic graphite boat sticking point exchanging machine die

Abstract

The invention belongs to the field of manufacturing of solar batteries, and particularly relates to an automatic graphite boat sticking point exchanging machine die. The automatic graphite boat sticking point exchanging machine die comprises an upper die assembly, a middle die assembly and a lower die assembly, when the automatic graphite boat sticking point exchanging machine die is used, a graphite boat of which sticking points need exchanging is placed in a graphite boat carrying platform in the middle die assembly, old sticking points are unloaded by the upper die assembly through utilizing upper die point unloading columns on the upper die assembly, then the middle die assembly is subjected to displacement to a point loading position, and the lower die assembly is also lifted and is subjected to displacement to the point loading position at the same time; new sticking points are mounted on the graphite boat through a point loading machine; the lower die assembly is used for achieving the effects of supporting and positioning in the course of loading the sticking points. The automatic graphite boat sticking point exchanging machine die disclosed by the invention is high in automation degree, easy and simple to operate, high in working efficiency and exchanging quality, and free from damaging the sticking points; the qualified rate of products is increased, the labor intensity of operators is alleviated, the working space and working environment are improved, and the application prospect is wide.

Description

technical field [0001] The invention belongs to the field of solar cell manufacturing, and in particular relates to an automatic graphite boat stick point replacement machine mold. Background technique [0002] With the rapid development of solar cells, more and more solar cells have entered the civilian field. In the production process of solar cells, PECVD (Plasma Enhanced Chemical Vapor Deposition, plasma enhanced chemical vapor deposition method) coating process is an important link in the production process and plays a pivotal role. PECVD uses microwave or radio frequency to ionize the gas containing the constituent atoms of the film to form plasma locally, and the plasma is highly chemically active and easy to react, depositing the desired film on the substrate. When the silicon wafer is subjected to its surface coating process, it is necessary to insert the uncoated silicon wafer into the carrier of the PECVD vacuum coating equipment. At present, the wafer carrier u...

AI Technical Summary

Problems solved by technology

[0003] The replacement method of the traditional graphite boat sticking point is complicated and cumbersome, and at the same time requires relatively high skills for the assembler. If the skill is not in place, the graphite boat sheet and the graphite boat stuck point will be damaged or the assembly will not be in place during the replacement process. The traditional graphite boat The operation method for replacing the stuck point of the boat is: the stuck point of the graphite boat needs to use a simple manual press, and at the same time, the two sides of the press need to be padded with foam boards or rubber leather pads to the same height as the manual press platform, and the operator sits on the press. Place the graphite boat flat on the manual press platform in front of the machine, and then remove the 24 sticking points of the graphite boat with a manual press in turn. After the graphite boat sticking points are removed, the operator will replace the new st...

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