Online white light interference thickness gauge

Abstract

The invention relates to the field of thickness gauges, in particular to an online white light interference thickness gauge. The online white light interference thickness gauge comprises a frame, a servo drive system, a probe system and an electronic control system. The servo drive system is laterally mounted on the upper portion of the frame. A probe base is arranged on the servo drive system. The probe system is mounted below the probe base. The probe system comprises a light source system, a spectrometer, a light leakage type concentrator, and a cooling system. The light leakage type concentrator can collect the reflected light into the spectrometer in the situation that the film to be tested is not flat or the film is vibrating. A light leakage type concentrator is adopted in the online white light interference thickness gauge so that the light deviation caused by the vibration of the film can be effectively collected, and the robustness of the light collection can be enhanced. Thedefect that the white light interferometer in the prior art can only measure the thickness offline in the laboratory is made up, and the thickness can be measured online in the production site.

Description

technical field [0001] The invention relates to the field of thickness gauges, in particular to an online white light interference thickness gauge. Background technique [0002] At present, X-ray thickness gauges and beta-ray thickness gauges are used to measure the thickness of transparent and translucent films. By measuring the areal density of the film, and then converting the material density into the thickness of the film. The thickness of the film is not directly measured. Once the density distribution of the film is uneven (the additives are unevenly distributed, resulting in uneven density distribution), the thickness and surface density cannot correspond. At this time, it is inaccurate to measure the thickness of the film by the above two measurement methods. The desktop white light interferometer has the following problems in measuring thickness: it cannot interact with third-party equipment in the production line in real time, so it cannot make real-time contro...

AI Technical Summary

Problems solved by technology

[0002] At present, X-ray thickness gauges and beta-ray thickness gauges are used to measure the thickness of transparent and translucent films. By measuring the surface density of the film, and then converting the material density into the thickness of the film

At this time, it is inaccurate to measure the thickness of the film by the above two measurement methods

The desktop white light interferometer has the following problems in measuring thickness: it cannot interact with third-party equipment in the production line in real time, so it cannot make real-time control of product quality, and most of them use Y-shaped optical fibers, which have relatively high requirements for the flatness of the measurement object. System measurement The robustness is not good, and it cannot be used for online measurement of the production line; nor is it specially used for on-site hardware equipment and man-machine interface

It can be seen that the technical problem solved by the present invention is to overcome the problems in the prior art that the frequent replacement of the probe and the too close distance of the induction coil affect the measurement results

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