A miniature fluxgate sensor based on three-dimensional structure iron core

Abstract

The invention discloses a micro-magnetic fluxgate sensor using a core with a three-layer stereo structure. The upper layer of the core and the lower layer of the core are in a rectangular shape; the middle layer of the core is of an array column structure and is connected to the upper layer and the lower layer; a excitation wire is a folding line structure composed of a plurality of straight wiresegments connected end to end, and is wound in the array column structure of the middle layer of the core; an induction coil is of a three-dimensional solenoid structure, and is wound around the longedge of the core vertically; a communication part between the upper layer and the lower layer of the three-dimensional solenoid coil is composed of a connecting conductor; a framework is made of silicon wafers as a substrate, and is used for carrying the core, the excitation wire, the induction coil, and pads; and the excitation wire and the induction coil are all led out by the pads arranged on the two ends of the sensor. According to the micro-magnetic fluxgate sensor based on the core with the three-layer stereo structure, the excitation wire of the micro-magnetic fluxgate sensor is arranged between the array columns of the middle layer of the core with the stereo structure, and at the same time, is sandwiched between the upper layer and the lower layer of the core, so that the excitation wire is wrapped by the core with the three-layer stereo structure, and the uniformity and saturation of the whole core is facilitated, thereby reducing the excitation current; the induction coil adopts a three-dimensional solenoid structure to ensure the magnetic field coupling is tight, and to reduce the magnetism leakage, so that the excitation current efficiency is improved, and the power consumption of the micro-magnetic fluxgate sensor can be effectively reduced.

Description

technical field [0001] The invention relates to a fluxgate sensor, in particular to a miniature fluxgate sensor prepared by micro-electromechanical technology (MEMS). Background technique [0002] Fluxgate sensor (hereinafter referred to as fluxgate) is a kind of weak magnetic measurement sensor with good comprehensive performance, which has the characteristics of high resolution, good temperature stability and small residual magnetic error. Among them, the structure of orthogonal fluxgate is simple , the linear measurement range is large, but there are problems of low sensitivity and high manufacturing cost. [0003] The document "International Publication No. WO2007010378 Patent" discloses an integrated orthogonal fluxgate magnetic field sensor. The core material surrounds the excitation rod in the form of cladding, and the excitation wire, iron core and induction coil are deposited and patterned to form multiple layers deposited on the substrate. The induction coil is o...

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Problems solved by technology

[0004] However, the orthogonal fluxgate described in the literature increases the measurement range by changing the length of the structure, which will cause a decrease in the sensitivity of the fluxgate; the efficiency of the induction coil of the planar spiral structure is not high; the increase in the number of layers of the induction coil can improve The sensitivity method increases the manufacturing complexity and manufacturing cost; the iron core made by the integrated circuit circuit layer accumulation process has a small cross-sectional area, which is not conducive to the improvement of sensor sensitivity

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