Degradable self-supported thin-film transistor device and production method thereof

Abstract

The invention discloses a degradable self-supported thin-film transistor device, mainly comprising a self-supported dielectric layer, a semiconductor active layer, a source electrode, a drain electrode and a gate electrode, and characterized in that natural macromolecular polymer film having ionic conductivity is used herein as the self-supported dielectric layer, and the semiconductor active layer and the coplanar source electrode, drain electrode and gate electrode are deposited on the self-supported dielectric layer in sequence, wherein the semiconductor active layer is arranged between thesource electrode and the drain electrode. The degradable self-supported thin-film transistor device has the advantages that the dielectric layer having supporting performance is used herein, extra substrates are not required, and the material structure of the degradable self-supported thin-film transistor device is simplified; the natural macromolecular polymer film has low cost and has good stability under room-temperature conventional environments; by controlling composition and structure of the film herein, it is possible to adjust the degradation rate of the film in a special environment,and therefore, the thin-film transistor device with controllable degradation rate is achieved.

Description

technical field [0001] The invention relates to the technical field of semiconductor devices, in particular to a degradable self-supporting thin film transistor device and a preparation method thereof. Background technique [0002] At present, various electronic devices are usually made of non-degradable, very stable, and possibly even toxic (such as gallium arsenide) substrate materials and electronic components in order to perform their functions stably. Thin film transistors are the most basic electronic components, and have been widely used in random access memory, flat panel display, photoelectric sensor and other fields. [0003] With the rapid development of electronic preparation technology, damaged or obsolete electronic devices are abandoned every moment, which will lead to serious environmental pollution. On the other hand, with the development and application of implantable medical devices, thin film transistor devices that are biocompatible and can degrade and ...

AI Technical Summary

Problems solved by technology

[0003] With the rapid development of electronic preparation technology, damaged or obsolete electronic devices are abandoned every moment, which will lead to serious environmental pollution

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