Flexible piezoelectric three-dimensional tactile sensor array and preparation method thereof

Abstract

The invention discloses a flexible piezoelectric three-dimensional tactile sensor array which comprises a PDMS semispherical projection layer, an upper electrode layer, a nanometer structure piezoelectric film layer, a lower electrode layer and a printed circuit board flexible substrate layer, wherein the PDMS semispherical projection layer, the upper electrode layer, the nanometer structure piezoelectric film layer, the lower electrode layer and the printed circuit board flexible substrate layer are successively connected from top to bottom. The nanometer structure piezoelectric film layer isa nano structure ZnO piezoelectric film and is arranged between the upper electrode layer and the lower electrode layer which are arranged in an array pattern manner, thereby forming a plurality of piezoelectric sensitive units. The three-dimensional tactile sensor array is composed of M*N separated sensor units. Each sensor unit comprises a PDMS semispherical projection and three piezoelectric sensitive capacitors. The PDMS semispherical projection transmits a three-dimensional contact force to the three piezoelectric sensitive capacitors. Through the magnitude of charges which are generatedby the three piezoelectric sensitive capacitors, the external three-dimensional contact force is measured. The invention further discloses a preparation method of the flexible piezoelectric three-dimensional tactile sensor. The flexible piezoelectric three-dimensional tactile sensor array has advantages of three-dimensional contact force measurement, high sensitivity, high flexibility and high dynamic response.

Description

technical field [0001] The invention belongs to the technical field of tactile sensors, and in particular relates to a flexible piezoelectric three-dimensional tactile sensor array and a preparation method thereof. Background technique [0002] The sense of touch is an important form of perception second only to vision for robots to obtain environmental information. In a broad sense, the sense of touch includes touch sense, pressure sense, force sense, sliding sense, and cold and heat sense. force feeling. Nowadays, since the tactile sensor can detect or perceive a series of small changes in physical characteristics when the robot interacts with objects and the environment, it can not only obtain the contact position between the robot's hand and the object and the distribution function of the contact force, but also obtain visual Object information that cannot be obtained, such as vibration characteristics, heat transfer characteristics, mechanical characteristics, etc., ta...

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Problems solved by technology

[0005] The purpose of the present invention is to overcome the shortcomings and deficiencies in the prior art, to provide a flexible piezoelectric three-dimensional tactile sensor array and its preparation method, by using inorganic nano-piezoelectric materials as the piezoelectric sensitive layer to solve the existing flexible The problem that the tactile sensor cannot have both high flexibility and high sensitivity; a sensor array unit is composed of hemispherical protrusions and three piezoelectric sensitive elements, and a simple preparation process is used to achieve a combination of high sensitivity and high flexibility. 3D Tactile Sensor Array

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