Method for preparing wide-band uncooled infrared detector based on FBAR

Abstract

The invention discloses to a method for preparing a wide-band uncooled infrared detector based on FBAR, relates to the technical field of infrared detection, and solves the problems that the absorption rate of the infrared detector prepared by the method is low and the absorption bandwidth of a wide band is limited. The method includes the steps of preparing the FBAR; preparing a dielectric layerand a metal array layer on the FBAR; preparing a readout integrated circuit substrate; connecting the readout integrated circuit substrate and the FBAR, wherein the metal array layer comprises a plurality of metal cells, and each metal cell is composed of at least three metal blocks of different sizes. The method has the advantages of integrated manufacturing, mass production, low cost and the like; by integrating the dielectric layer and the metal array layer on the surface of the FBAR, the enhanced absorption of the infrared spectrum by the uncooled infrared detector is achieved, the broadband absorption is achieved, the fabrication is simple, and the infrared detector has excellent detection performance; the prepared detector has the advantages of traditional uncooled infrared detection, and has fast response and high detection sensitivity.

Description

technical field [0001] The invention relates to the technical field of infrared detection, in particular to a preparation method of an FBAR-based wide-band uncooled infrared detector. Background technique [0002] According to the working temperature, infrared detectors are generally divided into two categories: cooling type and uncooling type. Cooled infrared detectors are usually made of semiconductor materials. Using the photoelectric effect of some materials, the photosensitive material absorbs photons, causing changes in electrical parameters. In order to suppress hot carriers and noise, the operating temperature of cooled infrared detectors is usually below 77K. It needs to be refrigerated by a refrigerator or liquid nitrogen, which will result in relatively large volume and weight, and relatively expensive prices. Uncooled infrared detectors are also called room temperature detectors, which can work at room temperature without refrigeration, so they have the advant...

AI Technical Summary

Problems solved by technology

At present, multi-layer structure absorption is usually used to increase the absorption bandwidth, and the absorption band of different layers is used to widen the absorption bandwidth of the absorption layer. Specifically, it includes: using different materials to prepare the absorption layer, but this method is limited by the stress of material preparation, and the range of material selection is limited. And increasing the thickness of the absorbing layer will affect the performance of the infrared detector; using a multi-layer micro-bridge structure, however, is limited by the difficulty of the process and the number of stacked layers is limited, so the absorption width is limited. In addition, this method greatly increases the process complexity and reduces the infrared detector. reliability

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