Preparation method of polarized infrared detector based on film bulk acoustic resonator

Abstract

The invention discloses a preparation method of a polarized infrared detector based on a film bulk acoustic resonator, relates to the technical field of infrared detection, and solves the problems that the infrared detector acquired according to the preparation method is relatively low in absorptivity and both structure and performance of the infrared polarized detector need to be improved. The method comprises the steps of preparing the film bulk acoustic resonator; sequentially preparing a metal reflective layer, a dielectric layer and a metal array layer on the film bulk acoustic resonator;preparing a read-out integrated circuit substrate; and connecting the read-out integrated circuit substrate and the film bulk acoustic resonator, wherein the meal array layer is composed of multiplemetal units with an accordant characteristic direction. The preparation method provided by the invention has the advantages of integrated manufacturing, batch production and low cost; the metal arraylayer is applied to polarized absorption and enhanced absorption of the infrared spectrum, the absorbed energy acts on the film bulk acoustic resonator, and the absorptivity is improved; the preparedinfrared detector is small in volume and weight and low in cost, has the advantages of traditional uncooled infrared defectors, and is quick to respond and high in detection sensitivity.

Description

technical field [0001] The invention relates to the technical field of infrared detection, in particular to a preparation method of a polarized infrared detector based on a film bulk acoustic wave resonator. Background technique [0002] Uncooled infrared detectors are also called room temperature detectors, which can work at room temperature without refrigeration, so they have the advantages of being more portable. Uncooled infrared detectors are generally thermal detectors, that is, they work by detecting the thermal effect of infrared radiation. Uncooled infrared detectors have advantages over cooled infrared detectors in terms of volume, weight, lifespan, cost, power consumption, start-up speed and stability because they omit the bulky and expensive refrigeration mechanism. However, there is a gap in response time and detection sensitivity compared with cooled infrared detectors. [0003] In recent years, with the development of micro-nano sensing technology, the appli...

AI Technical Summary

Problems solved by technology

The time-sharing polarization detector obtains the information of different polarization directions at different time points by rotating the polarizer. Although this technology is simple, the structure is unstable and it is easy to produce virtual images; the amplitude-sharing polarization detector is composed of multiple different focal planes , each focal plane optical path has polarizers in different directions. This system can effectively reduce the virtual image caused by target movement, but the energy utilization rate is low, the volume is large, and the price is expensive; the split-aperture polarization detector is controlled by the optical path. Images with different polarization directions are projected to different areas of the focal plane. Compared with the sub-amplitude system, its optical path is shorter, and the optical path is less likely to be disturbed after alignment, but its spatial resolution is low and its volume and weight are large

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