A Common-path Interferometric Electric Field Sensor with Stable Temperature at Static Operating Point
A technology of static operating point and electric field sensor, applied in electrostatic field measurement, temperature compensation modification, etc., can solve the problem of poor temperature stability of static operating point and achieve the effect of improving temperature stability
Active Publication Date: 2020-10-16
TSINGHUA UNIV
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[0007] The purpose of the present invention is to provide a common path interference electric field sensor with a stable static operating point temperature, improve the structure of the existing electric field sensor, and use the magnetron sputtering method to diffuse the lithium niobate crystal on the titanium surface of the sensor. Titanium dioxide (TiO 2 ) film to solve the problem of poor temperature stability at the static operating point of the current common-path interference electric field sensor
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[0029] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0030] The invention provides a common path interference electric field sensor with stable temperature at the static working point, and its structural diagram is as follows figure 2 As shown, it includes a lithium niobate crystal 1, a titanium-diffused lithium niobate waveguide 2, an electrode 3 and an antenna 4; wherein, the titanium-diffused lithium niobate waveguide 2 is formed by titanium diffusion on the upper surface of the lithium niobate crystal 1 , wherein, the titanium diffusion parameters used in the titanium diffusion lithium niobate waveguide 2 are: diffusion temperature 1020°C, diffu...
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Abstract
The invention relates to a common-path interference electric field sensor with stable temperature of quiescent operating point and belongs to the technical field of optical electric field measurement.The common-path interference electric field sensor comprises a lithium niobate crystal, a titanium-diffused lithium niobate waveguide, electrodes and an antenna; a propagating direction of the titanium-diffused lithium niobate waveguide is z axis; titanium dioxide is used as a magnetron sputtering target to perform magnetron sputtering on the upper surface of the titanium-diffused lithium niobatewaveguide; magnetron sputtering pressure is 2.5-5 millitorrs; magnetron sputtering time is 2-16.5 hours; titanium dioxide film is formed on the upper surface of the titanium-diffused lithium niobatewaveguide. The titanium-diffused lithium niobate waveguide is coated with a layer of titanium dioxide film; positive temperature coefficient of the titanium-diffused lithium niobate waveguide is compensated without affecting original measurement sensitivity and accuracy of an existing sensor; therefore, temperature stability of the quiescent operating point of the sensor is greatly improved.
Description
technical field [0001] The invention relates to a common-path interference electric field sensor with stable temperature at a static working point, in particular to an optical electric field sensor based on a common-path interference structure based on electro-optic effect, and belongs to the technical field of optical electric field measurement. Background technique [0002] Electric field measurement plays an important role in many fields of science and technology, especially in the fields of electric power and nuclear industry. The development of science and technology has higher and higher requirements for the accuracy of electric field measurement. [0003] The optical electric field sensor based on the photoelectric effect uses optical fiber to transmit signals, has excellent insulation performance and anti-interference ability, small size and wide frequency measurement, and has great application prospects. Lithium niobate is widely used as a material for optical elec...
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IPC IPC(8): G01R29/12G01R1/44
CPCG01R1/44G01R29/12
Inventor 曾嵘庄池杰汪海马昕雨
Owner TSINGHUA UNIV