Semiconductor chip
A semiconductor and chip technology, applied in the direction of semiconductor devices, semiconductor/solid-state device manufacturing, transistors, etc., can solve the problems of increased cut-off current and power consumption, and achieve the effects of improving regularity, suppressing manufacturing deviation, and improving yield
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[0025] Embodiments will be described below with reference to the drawings. In the following embodiments, the semiconductor chip includes a plurality of standard cells, and at least some of the standard cells in the plurality of standard cells include nanowire FETs (Field Effect Transistors).
[0026] Figure 7 It is a schematic diagram showing an example of a basic structure of a nanowire FET (also referred to as a gate-all-around (GAA: Gate All Around) FET). The nanowire FET is a FET using thin wires (nanowires) through which electric current flows. Nanowires are formed, for example, from silicon. Such as Figure 7 As shown, the nanowire extends horizontally on the substrate, that is, extends parallel to the substrate, and its two ends are connected to structures that become the source region and the drain region of the nanowire FET. In the specification of the present application, the structure connected to both ends of the nanowire in the nanowire FET and used as the so...
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