High-precision anti-interference large-working distance auto-collimation device and method
A high-precision, working distance technology, applied in measuring devices, using optical devices, measuring angles, etc., to achieve the effects of improving measurement accuracy, reducing impact, and increasing anti-interference ability
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specific Embodiment 1
[0038] This embodiment is an embodiment of a high-precision anti-interference and large working distance self-collimation device.
[0039] The high-precision anti-interference and large working distance self-collimation device of this embodiment, the structural diagram is as follows figure 2 shown. The self-collimation device includes a light source 1, a first polarizer 6, a feedback imaging unit 4, a first transmissive collimator 2, a combined reflector 5, a second polarizing beam splitter 7, an angular drift feedback measurement unit 8, and a wavefront distortion feedback measurement unit 9 .
[0040] The first polarizer 6 and the feedback imaging unit 4 are arranged between the light source 1 and the first transmissive collimator 2 . The feedback imaging unit 4 includes a first feedback beam splitter 41 and a first photoelectric sensor 42 . The first photoelectric sensor 42 is located on the focal plane of the first transmissive collimator 2 , and the optical axis is pe...
specific Embodiment 2
[0056] This embodiment is the second embodiment of the high-precision anti-interference and large working distance self-collimation device.
[0057] The high-precision anti-interference and large working distance self-collimation device of this embodiment, the structural diagram is as follows Figure 4 shown. On the basis of the first embodiment, the second transmissive collimator 82 is removed, and the third transmissive collimator 94 and the second polarizer 95 are added. The optical path structure of the angular drift feedback measurement unit 8 and the wavefront distortion feedback measurement unit 9 is adjusted to reduce the volume of the optical path and optical components, making the overall structure compact and stable, and more portable design advantages.
[0058] The self-collimation device of this embodiment includes a light source 1, a first polarizer 6, a feedback imaging unit 4, a first transmissive collimator mirror 2, a combined reflector 5, a third feedback b...
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