A highly reliable double-sided heterogeneous composite electrode thermal chip
A composite electrode and bottom electrode technology, applied in thermistors, non-adjustable metal resistors, circuits, etc., can solve problems such as product failure, reliability decline, and sudden change in chip electrical performance, to improve stability and reliability. sexual effect
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[0033] see figure 2 , which is a schematic structural view of the highly reliable double-sided heterogeneous compound electrode thermosensitive chip of the present invention.
[0034] The high-reliability double-sided heterogeneous composite electrode thermosensitive chip of the present invention includes a thermosensitive ceramic substrate 1, a surface electrode 2 and a bottom electrode 3, and the surface electrode 2 and the bottom electrode 3 are respectively arranged on the thermosensitive ceramic substrate 1 The surface electrode 2 is a silver layer, and the bottom electrode 3 is formed by stacking a titanium-tungsten layer 31 , a copper layer 32 and a gold layer 33 sequentially on the heat-sensitive ceramic substrate 1 from inside to outside.
[0035] Specifically, in the bottom electrode 3 , the thickness of the titanium-tungsten layer 31 is 0.1-0.15 microns, the thickness of the copper layer 32 is 0.1-0.2 microns, and the thickness of the gold layer 33 is 0.25-0.55 mic...
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