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Bottom electrode patterning organic electroluminescence device capable of realizing separated control and preparation method thereof

A patterned electrode and patterning technology, which is applied in the fields of electrical solid-state devices, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of blurred boundaries of light-emitting patterns and inability to prepare light-emitting patterns, and achieve product yields that remain unchanged. The effect of low preparation cost and simple process

Active Publication Date: 2019-04-23
上海晶合光电科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, for complex graphics, this method often cannot perform accurate electrode docking, and the corresponding electrode leads may be exposed, making the boundaries of the light-emitting patterns blurred, and the whole mechanical bonding process is difficult to solve the problem of continuous decline in yield caused by machine wear and tear. ; and this method cannot prepare hollowed-out luminous graphics

Method used

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  • Bottom electrode patterning organic electroluminescence device capable of realizing separated control and preparation method thereof
  • Bottom electrode patterning organic electroluminescence device capable of realizing separated control and preparation method thereof
  • Bottom electrode patterning organic electroluminescence device capable of realizing separated control and preparation method thereof

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preparation example Construction

[0033] The invention provides a method for preparing a discretely controllable bottom electrode patterned organic electroluminescence device, comprising the following steps:

[0034] (1) ITO modular etching is carried out on the ITO conductive glass to obtain a modular ITO layer;

[0035] (2) preparing a metal conductive layer on the modularized ITO layer to obtain a modularized ITO electrode;

[0036] (3) preparing a patterned insulating layer on the modular ITO electrode to obtain a patterned electrode;

[0037] (4) Evaporating an organic layer on the patterned electrode, the organic layer is sequentially a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer and an electron injection layer from bottom to top;

[0038] (5) Evaporating a metal electrode on the surface of the organic layer to obtain a discretely controllable bottom electrode patterned organic electroluminescent device.

[0039] The invention performs ITO modular e...

Embodiment 1

[0064] 1. Preparation of discretely controllable patterned electrodes

[0065] The first development: development control drive module

[0066] Use the full ITO to draw the control drive module through lithography technology, the specific steps are as follows:

[0067] 1. Spin-coat photoresist (1000rpm, 60s; 200nm) on the cleaned and dried all-ITO (150nm) conductive glass;

[0068] 2. Pre-baking (125°C, 90s);

[0069] 3. Put on the module electrode film board and expose for 90s;

[0070] 4. After soaking in the developer for 60s, rinse with deionized water;

[0071] 5. Post-baking (130°C, 2min);

[0072] 6. Soak in aqua regia to etch the ITO in the exposed area;

[0073] 7. Clean the photoresist with acetone;

[0074] 8. Prepare a metal conductive layer (molybdenum, aluminum, molybdenum, silver, copper, etc.) on the ITO.

[0075] Second development: developing fine pattern modules

[0076] Perform the second development operation on the regionalized ITO obtained in the...

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Abstract

The invention provides a preparation method of a bottom electrode patterning organic electroluminescence device capable of realizing separated control. The method comprises the following steps of performing ITO modular etching on ITO conductive glass; preparing a metal conducting layer on the obtained modular ITO layer to obtain a modular ITO electrode; preparing a patterning insulation layer on the modular ITO electrode to obtain a patterning electrode; then sequentially performing organic layer and metal electrode evaporation plating to obtain the bottom electrode patterning organic electroluminescence device capable of realizing separated control. The patterning insulation layer is introduced by the invention between a negative electrode and a positive electrode; only the single side electrode is subjected to modular treatment; the preparation cost is low; the process is simple; an expensive metal mask template and a precise mechanical laminating process are not needed; the productqualification rate maintains unchanged; in addition, the preparation of the electroluminescence device with hollow patterns can be realized. The invention also provides a bottom electrode patterning organic electroluminescence device capable of realizing the separated control, so that the pattern is precise and reliable.

Description

technical field [0001] The invention belongs to the technical field of organic electroluminescent devices, in particular to a discretely controllable bottom electrode patterned organic electroluminescent device and a preparation method thereof. Background technique [0002] In recent years, organic electroluminescent devices have been widely used in actual production and life, especially in the field of lighting and display. Compared with traditional inorganic electroluminescent devices, their preparation and application have become the most active one of the research fields. Organic electronic devices are semiconductor devices with specific functions prepared on the basis of conductive organic materials. Since most of the organic materials in organic electronic devices are composed of carbon and hydrogen, using them to make electronic devices has many advantages, such as Easy to make, low cost, chemically adjustable, transparent and easy to bend, etc. We take advantage of...

Claims

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Application Information

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IPC IPC(8): H01L51/56H01L51/52
CPCH10K71/621H10K50/805
Inventor 祝树炜魏斌严利民王伟钱强叶丛卓
Owner 上海晶合光电科技有限公司