High-precision five-axis three-dimensional ultrasonic polishing device and use method thereof

Abstract

The invention provides a high-precision five-axis three-dimensional ultrasonic polishing device and a use method thereof. The high-precision five-axis three-dimensional ultrasonic polishing device comprises an ultrasonic polishing equipment base, a moving mechanism, an ultrasonic polishing machining main power device, a workpiece ultrasonic vibration excitation assembly, a polishing fluid sprayingand atomizing device, a linkage position moving device and a polishing fluid collecting device; the workpiece ultrasonic vibration excitation assembly is installed on the upper part of the ultrasonicpolishing equipment base through a rotating working table I, and a workpiece fixture is installed at the front end of the workpiece ultrasonic vibration excitation assembly through a connector. The polishing fluid spraying and atomizing device comprises a three-freedom-degree mechanical arm and an ultrasonic precision spraying head arranged at the front end of the three-freedom-degree mechanicalarm. According to the high-precision five-axis three-dimensional ultrasonic polishing device and the use method thereof, complex curved surfaces can be machined under the condition of two-dimensionalultrasonic polishing, planes of workpieces can also be machined under the condition of three-dimensional ultrasonic polishing vibration, and the machining quality and the machining cost of the workpieces are considered at the same time.

Description

Technical field [0001] The invention relates to the field of numerical control manufacturing and processing equipment, in particular, to a high-precision five-axis three-dimensional polishing equipment and a use method thereof, which face the polishing processing of metal, hard and brittle material planes, and complex curved surfaces thereof. Background technique [0002] Smooth or ultra-smooth surface components are increasingly demanding and functioning in various fields of society. In the optical field, the surface roughness Ra of optical components used for reflection and refraction must be less than 0.012 microns, and in some high In sophisticated fields, such as aerospace, defense, biomedicine, and scientific instruments, due to the special requirements of their related functions, their manufacturing standards have very strict requirements on the surface quality of the workpiece, and the roughness of some optical surfaces is required to be as low as 1nm. Improving the accur...

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Problems solved by technology

[0006] According to the above, the workpiece polished by the existing ordinary polishing machine tool or one-dimensional ultrasonic machine tool is difficult to achieve high surface accuracy and low surface roughness, and it is easy to generate heat on the workpiece during processing, and it will also form thermal stress. The generation of thermal damage and fine cracks, if the high-quality workpiece is obtained through other special processing methods, the cost is extremely expensive technical problems, and a high-precision five-axis three-dimensional ultrasonic polishing device and its use method are provided

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