Semiconductor monocrystalline silicon lifting machine
A single crystal silicon and semiconductor technology, which is applied in the field of semiconductor single crystal silicon pulling machines, can solve the problems of complicated operation of single crystal silicon rods, the tip is not easy to be cut off, and the extraction of single crystal silicon rods is easily affected, and the operation is simple. Effect
Active Publication Date: 2019-05-17
内蒙古和光新能源有限公司
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Problems solved by technology
[0004] In order to overcome the disadvantages in the prior art that the polysilicon material in the molten state is easily splashed, it is easy to affect the extraction of the next single crystal silicon rod, the operation is complicated, and the tip of the single crystal silicon rod is not easy to be cut off, the present invention aims to solve The technical problem is to provide a semiconductor monocrystalline silicon pulling machine which is not easy to splash the polysilicon material in the molten state, does not affect the extraction of the next monocrystalline silicon rod, is simple to operate, and is easy to cut off the tip of the single crystal silicon rod
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[0028] A semiconductor monocrystalline silicon pulling machine, such as Figure 1-7 As shown, it includes a support plate 2, a motor 3, a furnace body 4, a graphite crucible 5, a quartz crucible 6, a cover 7, a cover 8, a single crystal silicon rod 9, a lifting mechanism 11, a frame 12, a first slide rail 13, First slider 14, first connecting rod 15, L-shaped plate 16, wedge block 17, second connecting rod 18, first elastic member 19, first inclined plate 20, first roller 21, push rod 22, cutting mechanism 23 and a moving mechanism 24; both support plates 2 are fixedly connected to the ground 1, the top of the support plate 2 is fixedly connected with a furnace body 4, and the top of the furnace body 4 is hingedly connected with a cover 7; both sides of the upper part of the furnace body 4 are fixedly connected with a Mechanism 23, the output end of cutting mechanism 23 stretches in body of heater 4; One side of body of furnace 4 bottom is fixedly connected with moving mechani...
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The invention belongs to the technical field of semiconductor monocrystalline silicon, and particularly relates to a semiconductor monocrystalline silicon lifting machine. The invention aims at solving the technical problems to provide the semiconductor monocrystalline silicon lifting machine with the advantages that the monocrystalline silicon materials in the molten state cannot be easily sputtered; the extraction of the monocrystalline silicon rods in a next time cannot be influenced; the operation is simple; the sharp heads of the monocrystalline silicon rods can be easily cut away. The semiconductor monocrystalline silicon lifting machine comprises support plates, a motor, a furnace body, a graphite crucible, a quartz crucible, a cover and the like, wherein the two support plates arefixedly connected onto the ground; a furnace body is fixedly connected onto the top of the support plate; the cover is hinged and connected onto the top of the furnace body. The monocrystalline silicon in the molten state cannot be easily sputtered; the extraction of the monocrystalline silicon rods in a next time is not influenced; the operation is simple; the sharp heads of the monocrystalline silicon rods can be easily cut away.
Description
technical field [0001] The invention belongs to the technical field of semiconductor single crystal silicon, in particular to a semiconductor single crystal silicon pulling machine. Background technique [0002] The multiple pulling method refers to the use of the normal CZ method to pull out a crystal from the quartz crucible, without opening the furnace body and turning off the heater, adding and melting the polysilicon material in the same quartz crucible. Pull the next crystal from the remaining raw material melt, so that multiple single crystal silicon rods can be pulled using the same crucible. When the single crystal silicon rod is extracted, the bottom of the single crystal silicon rod will form a pointed shape, which needs to be cut off later. Most of the existing technologies are to remove the single crystal silicon rod and then add it together with the polycrystalline silicon material. Recycling is carried out in a quartz crucible, which makes the operation compl...
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Login to View More IPC IPC(8): C30B15/02C30B29/06
Inventor 靳俊改
Owner 内蒙古和光新能源有限公司