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Micro-nano wire manufacturing device and micro-nano structure

A technology for preparing devices and micro-nano structures, which is applied in the field of microelectronics, can solve the problems of complex process, small preparation area, and high cost, and achieve the effects of ensuring physical and chemical properties, low requirements for preparation conditions, and a wide range of options

Pending Publication Date: 2019-05-28
XIAN JIAOTONG LIVERPOOL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In recent decades, there have been many methods for preparing one-dimensional micro-nano patterns or micro-nano wires, such as photolithography, micro-contact printing, inkjet printing, etc. However, these methods are costly and complicated, and the micro-nano The graphics are limited, usually only some designed graphics can be transferred to the substrate, and it is difficult to prepare nanometer-level patterns
At present, the infusion method is commonly used to prepare nanoscale patterns. However, the success rate of micro-nano wires prepared by infusion method is low, the preparation area is small, and the shape, direction and position of micro-nano wires are random and uncontrollable.

Method used

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  • Micro-nano wire manufacturing device and micro-nano structure
  • Micro-nano wire manufacturing device and micro-nano structure

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Embodiment 1

[0025] Such as figure 1 and figure 2 As shown, this embodiment relates to a micro-nano wire preparation device, including: a pair of X-axis linear displacement mechanism 100, Y-axis linear displacement mechanism 200, Z-axis linear displacement mechanism 300 and liquid-phase nanomaterial storage device 500, wherein, A substrate 800 is provided between a pair of X-axis linear displacement mechanisms 100; the liquid-phase nanomaterial storage device 500 is provided with a liquid outlet hole 501 and a micro-nano wire dispensing mechanism, and the micro-nano wire dispensing mechanism is set in one-to-one correspondence with the liquid outlet hole 501 The micro-nano wire application mechanism preferably includes two animal hairs 600, the roots of the two animal hairs 600 are preferably bonded on the liquid nanomaterial storage device 500, the liquid outlet 501 is arranged between the two animal hairs 600 roots, and the two animal hairs 600 The ends are drooping and lean against ea...

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Abstract

The invention provides a micro-nano wire manufacturing device and a micro-nano structure and belongs to the technical field of micro-electronics. The micro-nano wire manufacturing device comprises a liquid-phase nanometer material storing device and micro-nano wire arranging mechanisms; the liquid-phase nanometer material storing device is provided with at least one liquid discharging hole; the micro-nano wire arranging mechanisms and the liquid discharging holes are arranged in a one-to-one correspondence manner; each micro-nano wire arranging mechanism comprises at least two flexible wires;the surface of each flexible wire comprises regularly distributed micro-structures; the root part of each flexible wire is fixed to the liquid-phase nanometer material storing device; every two flexible wires form a group, and the end parts droop and fall on a substrate and lean against each other; and the included angle range of the two flexible wires of which the end parts lean against each other after the flexible wires are projected on the substrate is 1 to 5 degrees. The micro-nano wire manufacturing device provided by the invention can realize quick manufacturing of micro-nano wires based on the gravity of liquid-phase nanometer materials and the Lapras pressure difference and asymmetric retaining force of the flexible wires.

Description

technical field [0001] The invention relates to a technology in the field of microelectronics, in particular to a micro-nano wire preparation device and a micro-nano structure. Background technique [0002] Micro-nano patterns or micro-nano wires prepared on specific substrates using liquid-phase nanomaterials have great research prospects in integrated circuits, optical microelectronic devices, biosensors and biodetectors. The performance of devices in these fields is very large. The degree depends on the one-dimensional micro-nano pattern or micro-nano wire. For example, micro-nano patterns or micro-nano wires made of organic materials can improve the balance of electron and hole transfer, thereby improving the performance of integrated circuits and optical microelectronic devices. [0003] In recent decades, there have been many methods for preparing one-dimensional micro-nano patterns or micro-nano wires, such as photolithography, micro-contact printing, inkjet printing...

Claims

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Application Information

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IPC IPC(8): B25J11/00B25J9/02B25J15/00B82Y40/00
CPCB25J9/02B82Y40/00B25J11/00B25J15/00B81B5/00H01B1/12H01B7/0027B25J9/023H01B13/0003H01B13/322H01L29/0669
Inventor 方欲晓赵春赵策洲杨莉
Owner XIAN JIAOTONG LIVERPOOL UNIV
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