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Mirau-type super-resolution interference microscope objective

A technology of interference microscopy and microscopic objective lens, which is applied in microscopes, instruments, optics, etc., can solve the problems of non-optical imaging operation mode, poor experiment repeatability, and short observation time, and achieve compact structure and poor anti-interference ability , the effect of small measurement error

Active Publication Date: 2019-05-31
NANJING UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The seeding of microspheres is random, not a standardized optical imaging operation
Moreover, the method of immersion has the problem of being volatile, the observation time is short, and the repeatability of the experiment is poor.

Method used

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  • Mirau-type super-resolution interference microscope objective
  • Mirau-type super-resolution interference microscope objective
  • Mirau-type super-resolution interference microscope objective

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] In this example, we used a barium titanate microsphere array with a diameter of 50 μm combined with a PDMS film to make the microsphere lens film 4. The specific preparation method has been disclosed in the patent 201610113464.2. The total thickness of the microsphere lens film 4 is 100 μm. The thickness information of the reference plate 2 and the spectroscopic plate 3 is determined according to the formula of equal optical path length under the central wavelength. Spectroscopic plate 3 material fused silica (refractive index 1.4606, Abbe number 67.82), thickness 1mm, reference plate 2 material fused silica (refractive index 1.4606, Abbe number 67.82), thickness 1.132 mm, distance between reference plate 2 and spectroscopic plate 3 is 3 mm, and the distance from the reference plate to the microsphere lens film is 3 mm.

[0039] In this example, the microsphere lens film 4 is equivalent to the superposition of the microsphere plate 6 and the film plate 7, the material ...

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Abstract

The invention discloses a Mirau-type super-resolution interference microscope objective. The sub-nanometer axial resolution is achieved by employing an interference microscope objective, a microspherelens is employed to break through the diffraction limit to achieve two-dimensional lateral super-resolution. A super-resolution interference microscope objective through fusion of the interference microscope objective and the microsphere lens is provided, the microsphere lens is added between the interference microscope objective and a sample to be tested to optimize and design parameters of a reference panel, a beam splitter panel and the microscope objective, obtain clear 3D super-resolution interference fringes and achieve 3D high-resolution imaging. The Mirau-type super-resolution interference microscope objective can achieve horizontal super-resolution by means of a simple optical method to obtain the three-dimensional high-resolution information of the microstructure to be tested with no need for complex marking processing for the samples, can achieve rapid and lossless measurement and has a high practical value.

Description

technical field [0001] The invention belongs to the field of interference microscopic measurement, in particular to a Mirau type super-resolution interference microscopic objective lens. Background technique [0002] The existing commonly used micro-nano observation methods are mainly divided into optical microscopes, scanning probe microscopes and electron microscopes according to the imaging mechanism. Compared with other imaging methods, optical microscopy has the advantages of real-time, label-free, non-destructive, simple and convenient, low cost and maintenance, and plays an irreplaceable role in human exploration of the microscopic world. However, due to the diffraction limit, the lateral resolution of optical microscopy is half of the wavelength, with a maximum lateral resolution of only 200 nm. It cannot meet people's actual needs for microstructure observation. Wang Zengbo and others from the University of Manchester, UK, used silica microspheres with a radius of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B21/00G02B21/18G02B21/02G02B27/58
Inventor 袁群徐伟高志山孙一峰于颢彪施帅飞黄旭胡乔伟
Owner NANJING UNIV OF SCI & TECH
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