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Mirau Super-resolution Interference Microscope Objectives

An interference microscopy and super-resolution technology, applied in microscopes, instruments, optics, etc., can solve the problems of non-optical imaging operation mode, poor experiment repeatability, and short observation time, and achieve compact structure, small measurement error, and easy operation. simple effect

Active Publication Date: 2021-05-04
NANJING UNIV OF SCI & TECH
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

The seeding of microspheres is random, not a standardized optical imaging operation
Moreover, the method of immersion has the problem of being volatile, the observation time is short, and the repeatability of the experiment is poor.

Method used

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  • Mirau Super-resolution Interference Microscope Objectives
  • Mirau Super-resolution Interference Microscope Objectives
  • Mirau Super-resolution Interference Microscope Objectives

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] In this example, we used a barium titanate microsphere array with a diameter of 50 μm combined with a PDMS film to make the microsphere lens film 4. The specific preparation method has been disclosed in the patent 201610113464.2. The total thickness of the microsphere lens film 4 is 100 μm. The thickness information of the reference plate 2 and the spectroscopic plate 3 is determined according to the formula of equal optical path length under the central wavelength. Spectroscopic plate 3 material fused silica (refractive index 1.4606, Abbe number 67.82), thickness 1mm, reference plate 2 material fused silica (refractive index 1.4606, Abbe number 67.82), thickness 1.132 mm, distance between reference plate 2 and spectroscopic plate 3 is 3 mm, and the distance from the reference plate to the microsphere lens film is 3 mm.

[0039] In this example, the microsphere lens film 4 is equivalent to the superposition of the microsphere plate 6 and the film plate 7, the material ...

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Abstract

The invention discloses a Mirau type super-resolution interference microscope objective lens. The interference microscope objective lens is used to realize sub-nanometer axial resolution, and the microsphere lens is used to break through the diffraction limit to realize two-dimensional lateral super-resolution. This paper proposes a super-resolution interference microscope objective lens that combines the interference microscope objective lens and the microsphere lens. A microsphere lens is added between the interference microscope objective lens and the sample to be measured, and the parameters of the reference plate, the beam splitter plate, and the microscopic objective lens are optimized. , obtain clear three-dimensional super-resolution interference fringes, and realize three-dimensional high-resolution imaging. The method can achieve lateral super-resolution with simple optical means, obtain three-dimensional high-resolution information of the microstructure to be tested, and can realize fast and non-destructive measurement without complex labeling processing on the sample, and has strong practical value.

Description

technical field [0001] The invention belongs to the field of interference microscopic measurement, in particular to a Mirau type super-resolution interference microscopic objective lens. Background technique [0002] The existing commonly used micro-nano observation methods are mainly divided into optical microscopes, scanning probe microscopes and electron microscopes according to the imaging mechanism. Compared with other imaging methods, optical microscopy has the advantages of real-time, label-free, non-destructive, simple and convenient, low cost and maintenance, and plays an irreplaceable role in human exploration of the microscopic world. However, due to the diffraction limit, the lateral resolution of optical microscopy is half of the wavelength, with a maximum lateral resolution of only 200 nm. It cannot meet people's actual needs for microstructure observation. Wang Zengbo and others from the University of Manchester, UK, used silica microspheres with a radius of...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B21/00G02B21/18G02B21/02G02B27/58
Inventor 袁群徐伟高志山孙一峰于颢彪施帅飞黄旭胡乔伟
Owner NANJING UNIV OF SCI & TECH
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