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External reflection silver film preparation method based on magnetron sputtering

A technology of magnetron sputtering and silver film, which is applied in the field of preparation of externally reflective silver film based on magnetron sputtering, can solve the problems of low reflectivity of silver film, easy generation of black spots on the surface, environmental pollution, etc. good effect

Inactive Publication Date: 2019-06-04
江苏北方湖光光电有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The silver film reduced by the electroless silver plating method is relatively thin, and the surface is prone to black spots after a long time; the solutions used are harmful and pollute the environment; the reflectivity of the formed silver film is lower than that of the vacuum-plated silver film

Method used

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  • External reflection silver film preparation method based on magnetron sputtering
  • External reflection silver film preparation method based on magnetron sputtering
  • External reflection silver film preparation method based on magnetron sputtering

Examples

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Embodiment 1

[0030] The invention provides a method for preparing an external reflective silver film based on magnetron sputtering, comprising the following steps:

[0031] First, clean the cathode target, and install the required targets in sequence; among them, the required targets are NiCr target for No. 1 target, Ag target for No. 2 target, Si target for No. 3 target, and Si target for No. 4 target. The material is Ta target.

[0032] Paste insulating high-temperature tape on the edge of the cleaned fixture;

[0033] Put the cleaned substrate to be coated into the processed fixture, place it in the parts tray of the coating machine, press the vacuum chamber door and start vacuuming until the background vacuum degree P≤3.0×10 -6 torr.

[0034] After the preparatory work is completed, start the pre-sputtering target: Ag target pre-sputtering time is 45-55s, Si target pre-sputtering time is 300s-600s, until there are no splashed ideas; the preferred Ag target pre-sputtering time is 50s....

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Abstract

The invention discloses an external reflection silver film preparation method based on magnetron sputtering, and belongs to the technical field of optical films. According to the method, a bonding layer NiCrNx is added between a substrate and a silver film, an Ag film is subjected to sputtering after being plated, then the bonding layer NiCrNx is subjected to sputtering, a waterproof layer SiNx issubjected to sputtering, and finally, a reflection-additive layer of visible wave band is subjected to sputtering. According to the method, the reflectivity is greater than or equal to 95% within therange of 450 nm to 750 nm and 1540 nm, the reflectivity is greater than or equal to 98% within the range of 7000 nm-11000 nm, the surface quality and the firmness of the film layers are good, and test requirements such as the friction resistance, the dampness and heat resistance and the salt mist resistance can be met.

Description

technical field [0001] The invention relates to the technical field of optical thin films, in particular to a method for preparing an externally reflective silver film based on magnetron sputtering. Background technique [0002] The external reflective silver film is a kind of metal silver film coated on the surface of optical glass by vacuum coating, and a "bonding layer" is plated on the bottom of the silver film and a "barrier layer" is plated on the outside of the silver film. An external reflector, an optical element that reflects incident light. Through a special process method, the durability of the external reflective silver film is enhanced. The use of high-reflectance mirrors can double the output power of the laser, and the use of coated film surface mirrors not only has high brightness, but also is accurate and unbiased, with clearer picture quality and more realistic colors. Externally reflective silver coatings are widely used as the first choice for optical ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/18C23C14/06C23C14/10C23C14/08G02B5/08
Inventor 唐乾隆査家明李斯成陆丹枫汶韬
Owner 江苏北方湖光光电有限公司
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