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Chain equipment for crystalline silicon texturing and preparation method for single-sided inverted pyramid texturing

A kind of equipment and chain technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of increasing the manufacturing process and cost of solar cells, increasing the difficulty of back throwing, etc.

Active Publication Date: 2021-08-24
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the current texturing process of silicon wafers, all the texturing on both sides is obtained, which virtually increases the difficulty of back throwing. Therefore, it is necessary to additionally etch the back of the solar cell to remove the texturing pattern on the back. This increases the manufacturing process and cost of solar cells

Method used

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  • Chain equipment for crystalline silicon texturing and preparation method for single-sided inverted pyramid texturing
  • Chain equipment for crystalline silicon texturing and preparation method for single-sided inverted pyramid texturing
  • Chain equipment for crystalline silicon texturing and preparation method for single-sided inverted pyramid texturing

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Embodiment Construction

[0037] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below through specific embodiments in conjunction with the accompanying drawings.

[0038] image 3 is a top view of a chain device according to a preferred embodiment of the present invention, wherein image 3 The same chain drive system as in prior art chain equipment is not shown. Such as image 3 As shown, the chain equipment 3 includes a texturing tank 31, a chipping device 32, a metal removal tank 33, and a back polishing tank arranged in sequence along the direction indicated by the arrow D (that is, the moving direction of the crystal silicon on the texturing process line). Tank 34, cleaning tank 35 and drying tank 36.

[0039] Texture-making tank 31, slicer 32, metal removal tank 33, back polishing tank 34, cleaning tank 35 and drying tank 36 are all made of acid and alkali-resistant materials for use in v...

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Abstract

The invention provides a chain-type equipment for crystalline silicon texturing and a preparation method for single-sided inverted pyramid texturing. A metal tank, a back polishing tank, a cleaning tank and a drying tank, the slicer is used to separate two stacked silicon wafers and transfer them to the metal removal tank. The chain equipment of the present invention can make texturing of single crystal silicon and polycrystalline silicon, solves the problem of single purpose of the existing chain equipment, and can realize single-sided inverted pyramid texturing and back throwing process, saves the process flow, reduces the Manufacturing costs of solar cells.

Description

technical field [0001] The invention relates to the field of crystalline silicon texturing, in particular to a chain equipment for crystalline silicon texturing and a preparation method for single-sided inverted pyramid texturing. Background technique [0002] In order to improve the conversion efficiency of crystalline silicon solar cells, it is usually necessary to texture the surface of crystalline silicon solar cells to reduce the reflectivity of the surface of the solar cells, thereby increasing the short-circuit current of the solar cells. [0003] figure 1 It is a three-dimensional schematic diagram of a chain equipment for polysilicon texturing in the prior art, figure 2 yes figure 1 A top view of the chained device shown. Such as figure 1 with 2 As shown, the chain equipment 1 includes a support 11 placed on the ground, and a chain transmission system 12 and a tank 13 installed on the support 11 . The tank body 13 includes a texturing tank, a water tank, an a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L21/683
Inventor 吴俊桃刘尧平林珊陈伟赵燕陈全胜王燕杜小龙
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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