Flexible bionic tactile sensor based on microstructure and preparation method of flexible bionic tactile sensor

A tactile sensor and microstructure technology, which is applied in the sensor field to achieve the effects of good stability, convenient operation and sensitive response.

Active Publication Date: 2019-06-14
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] With the rapid development of communication technology and the continuous advancement of computer science and technology, more and more intelligent robots have entered our daily life, and the use of mechanical arms is closer to our lives. However, compared wi

Method used

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  • Flexible bionic tactile sensor based on microstructure and preparation method of flexible bionic tactile sensor
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  • Flexible bionic tactile sensor based on microstructure and preparation method of flexible bionic tactile sensor

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Embodiment 1

[0029] Such as Figure 1H As shown, the flexible bionic tactile sensor based on the microstructure of the embodiment of the present invention includes an imitation fingerprint layer 20 and two conductive structures 10 oppositely arranged, wherein each of the two conductive structures 10 includes a support layer 11, and is arranged on the support layer 11. The flexible layer 12 and the conductive sensitive layer 13 arranged on the flexible layer 12, the conductive sensitive layers 13 of the two conductive structures 10 are opposed to each other, and the imitation fingerprint layer 20 is arranged on the surface of one of the support layers 11 away from the flexible layer 12 .

[0030] The working principle of the above-mentioned tactile sensor is as follows: when an external force acts vertically on the upper and lower support layers 11, the effective contact area of ​​the upper and lower conductive sensitive layers 13 changes, causing the resistance value of the tactile sensor ...

Embodiment 2

[0038] Figure 1A to Figure 1H Shows the flow chart of the preparation method of the microstructure-based flexible bionic tactile sensor according to the embodiment of the present invention, which includes the following steps:

[0039] Step S1: Refer to Figure 1A with 1B , providing a first template 40 on which the conductive sensitive layer 13 is formed.

[0040] Specifically, the first template 40 includes a template body 42 and several blind holes 41 disposed on the template body 42 . The first template 40 is preferably a silicon-based template, and a blind hole 41 is etched on the template body 42 using a micromachining process commonly used in micro-electromechanical systems. The blind hole 41 is preferably an inverted regular pyramid structure, that is, an inverted pyramid structure, and the blind hole 41 The bottom surface of is a square with a side length of 10 μm, the height of the blind hole 41 is 7.06 μm, the angle between the side surface and the bottom surface ...

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Abstract

The invention discloses a flexible bionic tactile sensor based on a microstructure. The flexible bionic tactile sensor comprises a fingerprint imitation layer and two oppositely-arranged conductive structures; each conductive structure comprises a supporting layer, a flexible layer arranged on the supporting layer and a conductive sensitive layer arranged on the flexible layer; and the conductivesensitive layers of the two conductive structures abut against each other, and the fingerprint imitation layer is arranged on the surface, back on to the corresponding flexible layer, of the supporting layer of one of the conductive structures. The invention further discloses a preparation method of the flexible bionic tactile sensor based on the microstructure. The flexible bionic tactile sensorhas the advantages of being cheap in raw material, simple in process, convenient to operate and suitable for large-scale industrial production, especially the sensitivity of the sensor can be adjustedand controlled by adjusting the size and thickness of conductive protrusions in the conductive sensitive layers, and the high-precision, high-stability and high-sensitivity flexible bionic tactile sensor is obtained.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a microstructure-based flexible bionic tactile sensor and a preparation method thereof. Background technique [0002] With the development of the Internet of Things, flexible electronics and sensors have developed rapidly. Compared with traditional rigid devices, flexible sensors have attracted widespread attention because of their excellent performance, which can achieve biocompatibility, flexibility, and wearing comfort. . Flexible sensors can be used in the fields of electronic skin, wearable devices, health monitoring, and intelligent robots, and can realize functions such as information collection, health detection, and human-computer interaction. In recent years, with the continuous deepening of research on carbon nanotubes, graphene and nanomaterials, their broad application prospects continue to emerge, and various new materials are used in sensors. Carbon nanotubes are...

Claims

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Application Information

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IPC IPC(8): G01L1/20
Inventor 张珽曹玉东顾杨李铁
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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