An integrated optical waveguide power sensor chip and its constructed measurement system
A technology for integrating optical waveguides and sensor chips, applied in the field of measurement systems, can solve problems such as reducing measurement stability and accuracy, increasing the complexity and volume of the measurement system structure, and achieving improved integration, stability, and anti-interference capabilities Strong, good insulation performance
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Embodiment 1
[0027] Embodiment 1: as figure 1 As shown, an integrated optical waveguide power sensor chip, including:
[0028] Lithium niobate wafer 1, used as a substrate for integrated optical waveguide power sensor chips;
[0029] The Y-branch optical waveguide 2 is used to divide the input optical signal into two parts, and respectively input the first integrated optical waveguide Mach-Zehnder interferometer 3 and the second integrated optical waveguide Mach-Zehnder interferometer 4 connected thereto;
[0030] The first integrated optical waveguide Mach-Zehnder interferometer 3 is used to form a voltage sensing unit together with the strip electrode 5;
[0031] The second integrated optical waveguide Mach-Zehnder interferometer 4 is used to form a current sensing unit together with the segmented electrode 6 and the loop antenna 7;
[0032] The strip electrode 5 is used to access the measured voltage signal and generate an induced voltage between the electrodes, so as to modulate the ...
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