Continuous coating production system for intelligent loading of sheet substrates

Abstract

The invention discloses a continuous coating production system for intelligent loading of sheet substrates. The system at least comprises a conveying assembly line and a coating assembly line which are connected; the conveying assembly line is used for conveying substrates, and the coating assembly line comprises an inlet cavity, an inlet transition cavity, an inlet buffer cavity, a coating cavity, an outlet buffer cavity, an outlet transition cavity and an outlet cavity which sequentially communicate with one another and are connected end to end, and the sheet substrates enter the coating assembly line from the conveying assembly line through the inlet cavity and are moved out of the coating assembly line through the outlet cavity.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating, in particular to a continuous coating production system for intelligent loading of sheet substrates. Background technique [0002] Coated glass is also called reflective glass. Coated glass is coated with one or more layers of metal, alloy or metal compound films on the surface of the glass to change the optical properties of the glass to meet certain requirements. Coated glass can be divided into the following categories according to the different characteristics of the product: heat reflective glass, low-emissivity glass (Low-E), conductive film glass, etc. [0003] There are many production methods of coated glass, mainly vacuum magnetron sputtering method, vacuum evaporation method, chemical vapor deposition method and sol-gel method. Magnetron sputtering coating glass can design and manufacture multi-layer complex film system by using magnetron sputtering technology, and can plate a...

AI Technical Summary

Problems solved by technology

The process of producing coated glass by sol-gel method is simple and stable, but the disadvantage is that the light transmittance of the product is too high and the decoration is poor

[0004] The current coating equipment adopts the method of double-sided coating. The equipment is divided into front and back sides. Target materials are installed on both sides of the equipment, and the substrate rack loaded with glass is also divided into front and back sides. The heater is installed in the center of the vacuum chamber. One integral type, suspended in the air by means of hoisting, during the coating process, glass is loaded on the front and back of the substrate holder, and the substrate holder with glass is walking in the vacuum chamber during coating, and the front and back of the substrate holder are respectively located in the middle of the heating Both sides of the device are coated by magnetron sputtering through the target area. This method can only coat one side of the glass at a time. The glass is cleaned again, and then coated in the vacuum chamber again, that is, the coating process has to be repeated twice to complete, which not only wastes manpower, financial resources, low output, and the yield rate of the glass will be greatly reduced after multiple turnovers.

[0005] The structural design of the entire vacuum chamber can only complete the preparation of the film layer on one side of the sheet-like substrate at a time. If the film layer needs to be prepared on both surfaces of the sheet-like substrate, the existing technology can only prepare the sheet-like substrate. After filming the film layer on one surface, repeat the first film coating process on the sheet substrate to complete the preparation of the second film layer. This process will affect the first film layer during the second film preparation process. The performance of the layer is affected, and the overall production cost is higher due to the drop in yield due to the secondary coating

[0006] In addition, for energy-saving and environmentally friendly vanadium dioxide thermochromic smart glass, no matter whether it is annealed after high-temperature deposition or low-temperature deposition, it is generally carried out in the range of 400-600 ℃, but tempered glass is easy to The occurrence of stress loss leads to a decrease in safety performance, and the longer the temperature is kept at this temperature, the greater the profit loss, which ultimately makes the strength of the thermochromic smart glass fail to meet the standard. Therefore, the overall production line corresponding to this type of substrate should be adjusted. Design