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A flexible temperature and humidity sensor with an integrated structure and its preparation method

A temperature and humidity sensor and humidity sensitive technology, applied in the field of sensors, can solve problems such as the inability to realize the integrated design of temperature and humidity sensitive units and processing circuits

Active Publication Date: 2021-07-06
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a flexible temperature and humidity sensor with an integrated structure and its preparation method, which solves the technical problem that the current flexible temperature and humidity sensor cannot realize the integrated design of the temperature and humidity sensitive unit and the processing circuit

Method used

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  • A flexible temperature and humidity sensor with an integrated structure and its preparation method
  • A flexible temperature and humidity sensor with an integrated structure and its preparation method
  • A flexible temperature and humidity sensor with an integrated structure and its preparation method

Examples

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preparation example Construction

[0048] A method for preparing a flexible temperature and humidity sensor with an integrated structure, comprising the following steps:

[0049] Step 1: Prepare a flexible substrate 1 with two square bosses on both sides on a mold with grooves by multiple casting methods;

[0050] Step 2: Prepare a metal film on two symmetrical bosses on the upper and lower surfaces of the flexible substrate 1, and use a stripping process to obtain a temperature sensitive unit 301 and a temperature compensation unit 302 for the metal film;

[0051] Step 3: Make lower metal electrodes on the other two symmetrical bosses on the upper and lower surfaces of the flexible substrate 1, spin-coat the humidity-sensitive material on the lower electrodes, and dry them in an oven as a moisture-sensitive film. Prepare an upper metal electrode on the humidity-sensitive film, and complete the preparation of the humidity-sensitive element and the humidity compensation unit 304;

[0052] Step 4: Prepare the pr...

Embodiment 1

[0057] A flexible temperature and humidity sensor with an integrated structure, including a flexible substrate 1, on which a sensitive unit is arranged, and the sensitive unit includes a temperature sensitive unit 301 and a humidity sensitive unit 303, and the flexible substrate 1 A microcircuit chip 5 and a power supply unit 6 are also arranged on the top, the microcircuit chip 5 is used to process signals from the sensitive unit, and the power supply unit 6 is used to supply power to the microcircuit chip 5, the integrated design makes the flexible temperature The humidity sensor is more convenient to use.

[0058] The microcircuit chip 5 includes an ASIC chip and a wireless transmission chip, the ASIC chip is electrically connected with the wireless transmission chip through an I 2 C interface, the ASIC chip is used for processing signals from sensitive units, and the wireless transmission chip is used for The signal processed by the ASIC chip is used to interact with the r...

Embodiment 2

[0062] Based on the integrated structure of Embodiment 1, the present invention further provides a high-precision flexible temperature and humidity sensor, specifically:

[0063] The upper surface of the flexible substrate 1 is provided with a boss A201 and a boss C203, and the lower surface of the flexible substrate 1 is provided with a boss B202 symmetrical to the boss A201 and a boss D204 symmetrical to the boss C203. The boss and the flexible substrate 1 are integrally formed, and are square, which is convenient for the temperature sensitive unit 301 and the temperature compensation unit 302 to be pasted. When the height of the boss is 30 μm, it is most beneficial to reduce the influence of deformation on the measurement signal of the flexible temperature sensor; A temperature sensitive unit 301 is provided on the boss A201, a humidity sensitive unit 303 is arranged on the boss C203, a temperature compensation unit 302 is arranged on the boss B202, a humidity compensation u...

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Abstract

The invention discloses a flexible temperature and humidity sensor with an integrated structure, which belongs to the field of flexible sensors and includes a flexible substrate on which a sensitive unit is arranged, and the sensitive unit includes a temperature sensitive unit and a humidity sensitive unit. The flexible substrate is also provided with a microcircuit chip and a power supply unit, the microcircuit chip is used to process the signal from the sensitive unit, and the power supply unit is used to supply power to the microcircuit chip, the integrated design makes the flexible temperature The humidity sensor is more convenient to use.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a flexible temperature and humidity sensor with an integrated structure and a preparation method thereof. Background technique [0002] A temperature and humidity sensor refers to a device or device that can convert temperature and humidity into electrical signals that are easily measured and processed. Because temperature and humidity are inseparable from the perspective of physical quantity itself or the application in actual people's lives, a sensor integrating temperature and humidity will be produced accordingly. [0003] Traditional temperature and humidity sensors have large volume, weight and power consumption and rigid structure, while flexible temperature and humidity sensors can be bent and stretched, light and small, and can be used in wearable devices. However, the current flexible temperature and humidity sensors at home and abroad have the following problems: [...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K7/18G01N27/12
CPCG01K7/18G01N27/121
Inventor 黎威志熊丽刘杨张天高若尧杜晓松太惠玲
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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