Full-automatic scanning location and quantitative analysis system for global components of large-scale samples

Abstract

The invention relates to a full-automatic scanning location and quantitative analysis system for global components of large-scale samples, and belongs to the technical field of material surface representation. The system comprises a high-precision numerical control worktable system, a microscopic photographing matrix system, a GPU workstation group, a laser spectrum analyzer, a network switch anda terminal server, wherein the microscopic photographing matrix system and the GPU workstation group are adopted to control the high-precision numerical control worktable system and carry out multi-group microscopic photographing and image data processing on sample surfaces, so as to realize recognition and location of microstructure and occluded foreign substances on the surfaces of materials; and a laser-induced breakdown spectroscopy (LIBS) analysis technology is adopted to carry out guidance analysis on calibrated occluded foreign substances, so as to realize representation of occluded foreign substance composition. The full-automatic cross-scale metallographical laser spectrum in-situ analysis system creatively combines a metallographical microscopic technology with the LIBS analysistechnology, thereby solving the key problems of recognition, location and composition for global microscopic structures and occluded foreign substances on the surfaces of cross-scale materials.

Description

technical field [0001] The invention relates to the technical field of material surface characterization, in particular to a system for fully automatic scanning, positioning and quantitative analysis of global components of large-scale samples. Background technique [0002] Large-scale metal components such as aviation superalloy turbine disks, nuclear power pipelines, and high-speed rail wheels are key core components of major projects. Grain boundary segregation and inclusions in the microstructure of meter-scale large-scale metal components are important factors for the failure of key components in industries such as aviation, high-speed rail, and nuclear power. [0003] At present, metallographic microscopy or scanning electron microscopy / energy spectroscopy (SEM / EDS) methods are usually used at home and abroad, combined with complex sample pretreatment (cutting) to obtain information on inclusions on the surface of large-scale samples, but this method has the following ...

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Problems solved by technology

[0003] At present, metallographic microscopy or scanning electron microscopy / energy spectroscopy (SEM / EDS) methods are usually used at home and abroad, combined with complex sample pretreatment (cutting) to obtain information on inclusions on the surface of large-scale samples, but this method has the following disadvantages: 1. The size of the test sample is limited, usually more than ten square millimeters, and it is impossible to obtain accurate information on the microstructure and inclusions on the surface of large-scale samples; second, the metallographic microscope cannot provide the composition information of the inclusions; third, the scanning electron microscope SEM analysis speed Slow, complex operation requires specialized operators; 4. The excitation chamber needs to be evacuated, and all samples need to be placed in the excitation chamber. Therefore, the excitation chamber needs to have a larger volume

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