Management methods and processing devices of processing device

A processing device and management method technology, applied to fine working devices, grinding devices, stone processing equipment, etc., can solve problems such as poor productivity and achieve the effect of realizing productivity

Active Publication Date: 2022-06-24
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] However, the checklist is made of paper, and there is a problem that the operator has to compare a plurality of checklists in the past when he wants to see the history of the inspection results, and the productivity is poor.

Method used

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  • Management methods and processing devices of processing device
  • Management methods and processing devices of processing device
  • Management methods and processing devices of processing device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0022] Hereinafter, the management method of the processing apparatus of this invention, and embodiment of a processing apparatus are demonstrated, referring drawings.

[0023] First, the processing apparatus of this invention is demonstrated. exist figure 1 A cutting device 2 is shown as an example of a machining device. The cutting device 2 includes: a chuck table 4 that sucks and holds a workpiece; an imaging unit 6 that captures an image of the workpiece held by the chuck table 4 to detect a region to be cut; and cutting The unit 8 cuts the workpiece held by the chuck table 4 . Chuck table 4 in figure 1 The X-axis direction indicated by the middle arrow X is mounted on the device casing 10 movably and rotatably, and is moved in the X-axis direction by an X-axis direction moving unit (not shown), and is moved in the X-axis direction by a motor (not shown) to rotate. On the upper end portion of the chuck table 4, a porous suction chuck 12 connected to a suction unit (no...

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PUM

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Abstract

To provide a processing device management method and a processing device that can easily refer to the history of inspection results and improve productivity. The management method of the processing device includes the following steps: a display step of displaying a checklist in which a plurality of check items are recorded on a display unit; an input step of filling in information in the checklist according to check items; and a storage step of combining the information with the filled The year, month, and day entered into the audit table are stored together in the storage unit.

Description

technical field [0001] The present invention relates to a management method of a processing apparatus and a processing apparatus, and can improve productivity. Background technique [0002] A wafer that is divided by a plurality of intersecting planned dividing lines and has a plurality of devices such as ICs and LSIs formed on the front surface is divided into individual device chips by a processing device such as a dicing device or a laser processing device, and the divided device chips are used for moving. Electronic equipment such as telephones and personal computers. [0003] The dicing device generally includes: a chuck table that attracts and holds the wafer; a photographing unit that detects the planned dividing line of the wafer held by the chuck table; and an X-axis direction moving unit that makes the chuck table move in the X-axis direction. Move in the axial direction; a cutting unit, which has a main shaft with a Y-axis direction perpendicular to the X-axis di...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B37/005B24B37/04B24B37/27B24B37/34B24B49/12B24B55/06B28D5/00B28D7/04B28D7/02B28D7/00B23K26/70B23K26/38
CPCB28D5/00B28D5/0064B28D5/0076B28D5/0082B28D5/0058B24B37/005B24B37/04B24B37/27B24B37/345B24B37/34B24B49/12B24B55/06B23K26/38B23K26/702Y02P90/30H01L21/78H01L21/67092H01L21/67259H01L21/67282H01L21/67271
Inventor 田中万平
Owner DISCO CORP
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