Vertical cavity surface emitting laser and manufacture method thereof
A vertical-cavity surface-emitting, manufacturing method technology, applied in the field of vertical-cavity surface-emitting lasers, can solve the problems of similar refractive index and low light output efficiency of VCSEL, and achieve the effect of improving reflectivity, improving light output efficiency, and increasing reflection probability
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[0031] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0032] An embodiment of the present invention provides a vertical cavity surface emitting laser. figure 1 A schematic structural diagram of a vertical cavity surface emitting laser provided by an embodiment of the present invention. see figure 1 , the vertical cavity surface emitting laser comprises a substrate 10, a lower reflective layer 21, a light emitting region 30, an upper reflective layer 22, an upper metal electrode 41 and a lower metal electrode 42, a lower reflective layer 21, a light emitting region 30, an upper reflective layer 22 and The upper metal electrode 41 is sequentially stacked on the first surface of the substrate 10 , the lower metal electrode 42 is disposed on the second surface of the substrate 10 , and the s...
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