Electrostatic spraying device
A technology of electrostatic spraying and electrostatic force, which is applied in the direction of electrostatic spraying device, spraying device, spray discharge device, etc., can solve the problems of uneven surface roughness of the film and cannot meet the process requirements of film flatness, and achieve the film surface roughness And the effect of improving the uniformity of porosity
Active Publication Date: 2020-08-18
INST OF PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology
[0003] In the traditional electrostatic spraying process, due to the lack of screening means for the diameter or quality of the sprayed material, the surface roughness of the film formed by the sprayed material with uneven diameter or quality on the surface of the workpiece to be sprayed is not uniform, which cannot meet the requirements of thin film such as semiconductor thin film devices. Process requirements with high flatness requirements
Method used
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Embodiment Construction
[0025] This embodiment provides an electrostatic spraying device, figure 1 is a schematic diagram of the first state of an electrostatic spraying device according to an embodiment of the present invention, figure 2 is a schematic diagram of the second state of the electrostatic spraying device according to an embodiment of the present invention. The electrostatic spraying device includes: a nozzle 110 , a fixing frame 111 , a DC power supply 113 and a position control device 114 .
[0026] The nozzle 110 is made of conductive material, and its shape can be a hollow cylinder or a shape that can be easily imagined by those skilled in the art as the nozzle 110, for spraying the sprayed material. The sprayed material is discrete particles. The form can be liquid droplets, solid powder particles, suspended droplets or colloidal droplets mixed with solid and liquid.
[0027] The fixing frame 111 is made of conductive material, and it forms a fixing structure for fixing the workpi...
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The invention provides an electrostatic spraying device. The electrostatic spraying device comprises a nozzle for ejecting spray materials, a fixing frame which faces the nozzle and is used for fixinga to-be-sprayed workpiece, a direct-current power supply used for generating an electric field required for spraying and a position control device connected with the nozzle and the fixing frame, wherein the negative pole of the direct-current power supply is connected with the nozzle, the positive pole of the direct-current power supply is connected with the fixing frame, the position control device is used for forming a first included angle between the vertical connecting line direction from the nozzle to the plane where the to-be-sprayed workpiece is located and the gravity direction, and then the spray materials sprayed from the nozzle can be screened on the basis of the diameter and / or the mass by means of the gravity so as to adjust the state of a sprayed film on the surface of the to-be-sprayed workpiece. According to the electrostatic spraying device, the spray materials sprayed from the nozzle are screened on the basis of the diameter and / or the mass by means of the gravity, the uniformity of the diameter and / or the mass of the screened spray material is relatively high, the surface roughness of the film formed on the surface of the to-be-sprayed workpiece after the spraymaterials are sprayed is uniform, so that the uniformity of the surface roughness of electrostatic spraying is improved.
Description
technical field [0001] The invention relates to the field of electrostatic spraying, in particular to an electrostatic spraying device. Background technique [0002] Electrostatic spraying technology is a directional and efficient spraying film forming technology, mainly by adding a high-voltage electrostatic field between the nozzle and the workpiece to be sprayed, when the carrier gas or liquid propeller sends the sprayed material from the storage bin to the nozzle, Since the nozzle is connected to the negative pole of the DC power supply, a dense charge is generated near the nozzle, so that the spray material droplets or powder sprayed through the nozzle are charged. When the charged droplet or powder enters the electrostatic field with high electric field strength, under the action of driving force, electrostatic force and gravity, the sprayed paint will fly to the workpiece to be filmed, and on the workpiece to be sprayed with positive charge Surface adsorption coating...
Claims
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IPC IPC(8): B05B5/025B05B5/08B05B5/16B05B15/68B05B12/08B05B14/00B05B15/55B05D5/02B05D3/02
CPCB05B5/0255B05B5/08B05B5/16B05B12/082B05B14/00B05B15/55B05B15/68B05D3/0254B05D5/02
Inventor 于晴孟庆波李冬梅吴会觉罗艳红石将建
Owner INST OF PHYSICS - CHINESE ACAD OF SCI