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Precise outer rotor air-floating polishing device

A polishing device and outer rotor technology, applied in grinding/polishing safety devices, surface-polished machine tools, grinding/polishing equipment, etc. issues such as promotion

Inactive Publication Date: 2019-09-20
SHENZHEN HI TEST SEMICON EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The existing grinding and polishing device is usually fixedly connected with a rotating shaft to rotate a columnar grinding block, so as to realize the polishing of the workpiece, but this polishing method can only be cooled by accelerating the flow of gas or liquid outside the grinding block. The efficiency is low, and it is impossible to effectively curb the increase of the temperature of the grinding block. At high temperatures, both the grinding block and the workpiece will gradually appear softening and deformation with reduced hardness, which will affect the final polishing quality of the workpiece.

Method used

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  • Precise outer rotor air-floating polishing device

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Embodiment Construction

[0010] Said invention consists of radial bearing air circuit 1, thrust bearing air circuit 2, locking screw 3, spindle end cover 4, thrust bearing 5, radial bearing 6, bearing orifice 7, polishing cylinder 8, spindle stator 9. The axial air hole 10, the transmission belt 11, and the rotating device 12 are composed of several parts.

[0011] The radial bearing air circuit 1 guides the airflow to the throttle hole of the radial bearing through the air hole opened in the main shaft stator to provide stable air pressure.

[0012] The thrust bearing air circuit 2 passes through the air holes on the surface of the main shaft stator to the axial air holes of the radial bearing and the thrust bearing. 10 The thrust bearing provides stable air pressure and forms air molds on both sides of the thrust bearing.

[0013] The main function of the locking screw 3 is to fix the spindle end cover and the polishing cylinder to rotate together.

[0014] The spindle end cover 4, which rotates with the po...

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Abstract

The invention discloses a precise outer rotor air-floating polishing device. A rotating polishing cylinder is located on the outer side of an air-floating bearing, and the inner part and the outer part of the polishing cylinder contact air, so that the heat dissipation efficiency is greatly improved, and no heat dissipation structure needs to be specially arranged; and a radial bearing adopts orifice compensation, and an axial bearing adopts a porous matter, so that an air-floating main shaft is ensured to have a large bearing capacity in the radial direction and have high rigidity in the axial direction during grinding.

Description

Technical field [0001] The invention belongs to the scope of automation parts, and particularly relates to the structure of an ultra-precision outer rotor air floatation polishing device. Background technique [0002] Existing grinding and polishing devices usually have a rotating shaft fixedly connected to a cylindrical grinding block to rotate, so as to polish the workpiece, but this type of polishing can only be cooled by accelerating the flow of gas or liquid outside the grinding block. The efficiency is low, and the temperature increase of the polishing block cannot be effectively contained. Under high temperature conditions, the polishing block and the workpiece will gradually appear softening deformation with reduced hardness, which affects the final polishing quality of the workpiece. Summary of the invention [0003] The purpose of the present invention is to provide a precision external rotor air-floating polishing device. The rotating polishing cylinder of the present i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B29/02B24B41/04B24B55/02
CPCB24B29/02B24B41/04B24B55/02
Inventor 田硕
Owner SHENZHEN HI TEST SEMICON EQUIP