An optomechanical micromechanical gyroscope based on dual subwavelength grating cavity detection

Abstract

The invention discloses an optomechanical micromechanical gyroscope based on dual subwavelength grating cavities for detection. The subwavelength grating is used to construct a high-quality factor optical resonant cavity, and the dual subwavelength grating cavity is used to realize the push-pull working mode. The differential detection of the resonant frequency realizes the angular velocity calculation, which can effectively improve the detection sensitivity of the micro-mechanical gyroscope; the use of optical signals to detect the micro-mechanical gyroscope has high precision, good stability, and strong anti-electromagnetic interference ability compared with electrical detection methods , small parasitic capacitance, good linearity, small system volume, high integration, etc., and the grating period of the subwavelength grating is smaller than the wavelength of the incident light, and the subwavelength grating cavity with high quality factor is used for micromechanical gyro detection. Compared with the existing The optical detection method has higher detection accuracy and detection sensitivity; both the drive mode and the detection mode of the mass block adopt the coplanar vibration mode, which can avoid the excessive damping of the pressure film when the micro-mechanical gyroscope is working, which will affect the mechanical sensitivity.

Description

technical field [0001] The invention relates to the technical field of micro-inertial sensing in micro-mechanical systems, in particular to an optomechanical micro-mechanical gyroscope based on dual subwavelength grating cavity detection. Background technique [0002] The gyroscope is the key inertial sensing device in the inertial navigation system. It provides various attitude parameters for the vehicle through the measurement of angular velocity. Its performance directly determines the performance of the inertial navigation system and its application fields. Among many types of gyroscopes, micromechanical gyroscopes (also known as MEMS gyroscopes) have the advantages of small size, light weight, low cost, low power consumption, high integration, impact resistance, and mass production. The mainstream inertial sensing devices in precision inertial navigation systems have been widely used in both civilian and military fields, and are an important strategic technology related...

AI Technical Summary

Problems solved by technology

[0005] In view of this, the present invention provides an optomechanical micro-mechanical gyroscope based on double-subwavelength grating cavity detection, which is used to solve the problems of poor anti-electromagnetic interference, large parasitic capacitance, and severe nonlinearity in the traditional capacitive detection method of micro-mechanical gyroscopes. , low integration, difficult on-chip integration, etc., and solve the problems of low detection accuracy and detection sensitivity of micro-mechanical gyroscopes based on grating detection

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