Optical antenna preparation method and optical chip
An optical antenna and optical chip technology, applied in the field of photonics, can solve the problems of narrow application range, low coupling efficiency, and poor practicability of optical chips, and achieve the effects of simple manufacturing process, reduced processing cost, and good practicability
Active Publication Date: 2021-10-01
TSINGHUA UNIV
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Problems solved by technology
In the related technology, mainly through multiple etching, the cost is high and the coupling efficiency is low
In addition, optical chips containing optical antennas have a narrow range of applications and are less practical
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[0015] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0016] The optical antenna on the chip can convert the light between the waveguide on the chip and the free space, and is a key component of the integrated optical chip. In the related art, the etching method is mainly performed multiple times, and the cost is relatively high.
[0017] In view of the problems in the related technologies, in combi...
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Embodiments of the present invention provide an optical antenna preparation method and an optical chip, which belong to the field of photon technology. It includes: performing a single etching process on a preset platform to obtain an optical antenna; wherein, the optical antenna includes a waveguide area and a grating structure, and the grating structure is located on the side of the waveguide area. In the method provided by the embodiment of the present invention, an optical antenna is obtained by performing a single etching process on a preset platform. The method for preparing an optical antenna and the optical chip provided by the embodiments of the present invention can provide a coupling efficiency comparable to that of multiple etchings. Since it can be processed by single etching, the manufacturing process of the multi-etched structure is simpler, and the processing cost can be significantly reduced, so that the application range is wider and the practicability is better.
Description
technical field [0001] Embodiments of the present invention relate to the field of photon technology, and in particular, to a method for preparing an optical antenna and an optical chip. Background technique [0002] The optical antenna on the chip can convert light between the waveguide on the chip and the free space, and is a key component of the integrated optical platform. In the related art, the method is mainly through multiple etchings, and the cost is high and the coupling efficiency is low. In addition, the application range of the optical chip including the optical antenna is narrow and the practicability is poor. Contents of the invention [0003] In order to solve the above problems, embodiments of the present invention provide an optical antenna manufacturing method and an optical chip that overcome the above problems or at least partially solve the above problems. [0004] According to a first aspect of an embodiment of the present invention, a method for p...
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IPC IPC(8): G02B6/136G02B6/12
CPCG02B6/12007G02B6/136
Inventor 陈明华杨博
Owner TSINGHUA UNIV