On-chip mode multiplexing/demultiplexing method based on subwavelength grating structure
A subwavelength grating and mode multiplexing technology, applied in the field of optical communication, can solve the problems of large device size, difficult application, low tolerance of manufacturing process, etc., to achieve high tolerance and achieve the effect of high-order mode multiplexing
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[0016] like figure 1 As shown, the present embodiment obtains seven cascaded directional couplers 3 processed on a silicon (SOI) platform on an insulating substrate 1, and injects TE from the input port 4 of the bus waveguide 0 In the transmission process, the fundamental mode is selectively input from the subwavelength grating input port 5, and then coupled to the bus waveguide 2 through the subwavelength grating cone 8, subwavelength grating waveguide 7 and strip waveguide 6 to become the corresponding high-order mode, the multi-channel signal continues to propagate forward in the bus waveguide, thereby realizing the multiplexing / demultiplexing of seven modes.
[0017] The processing refers to: realize on the SOI substrate by electron beam exposure and inductively coupled plasma etching, and then use plasma enhanced chemical vapor deposition to deposit 1 μm thick SiO 2 Thin films are deposited on the chip.
[0018] In this embodiment, each directional coupler 1 includes: a...
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