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Processing medium, processing composition and processing method

A technology of composition and amine compound, which is applied in the direction of lubricating composition, polishing composition containing abrasive, metal processing equipment, etc., can solve problems such as malfunction and leakage current, and achieve the effect of preventing metal pollution

Active Publication Date: 2021-05-11
PALACE CHEM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Metal ions are easy to move on the surface of the workpiece, and the movement of metal ions may cause the following problems: malfunction of elements such as transistors formed on the workpiece (such as a wafer), leakage current

Method used

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  • Processing medium, processing composition and processing method
  • Processing medium, processing composition and processing method
  • Processing medium, processing composition and processing method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0049]Next, an embodiment and a comparative example of the machining medium will be described.

[0050][Sample production]

[0051]First, the processing medium (sample) of Examples 1-24 and Comparative Examples 1-11 was produced in Examples 1-24 and Comparative Examples 1-11 in Table 1- Table 7. Here, the alkaline substance is dissolved into the water, the polyvalent carboxylic acid is added, and tert-butylbenzoic acid as an aromatic monocarboxylic acid is stirred, and the interface active agent, 1,2,3-benzotriazole is required to be added. And water is added to adjust the concentration, thereby obtaining a processing medium. Further, here, free of preservatives, defoamers, spices, dyes, etc.

[0052]Further, Table 1, the product name of the blending component described in Table 7, and the manufacturer name is as follows.

[0053]Adaption: trade name, manufacturer

[0054]· Oxal acid: oxalic dihydrate, Lingjiang Chemistry (shares)

[0055]· Apple acid: DL-MALIC ACID, Tokyo into Industry (shares)

[0056...

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Abstract

The invention provides a processing medium, a processing composition and a processing method with antirust performance and metal pollution prevention performance. The processing medium of the present invention contains or contains in a neutralized state a polyvalent carboxylic acid having 2 or more and 7 or less carbon atoms, an aromatic monocarboxylic acid, and a basic substance.

Description

Technical field[0001]The present invention relates to a machining medium, a processing composition, and a processing method.Background technique[0002]During the process of cutting the egg (casting] or the like, the process of grinding (grinding) of the cutting surface of the process, or thus grinding the cut surface of the processed into a mirror process. For tools (such as wire saws, tape saws, inner diameter blades, abrasive rolling plates, etc.) to process medium (processing, cutting fluid, coolant). After diluting with water such as water, it is diluted with water, or in the form of a processed composition (grinding liquid, grinding liquid, slurry). The machining medium has the following effects, that is, the cooling effect of thermal cooling generated between the tool and the process; the lubrication effect of becoming the tool and the process by the process; the particles generated during processing (chips) , Severed films, grinding), and welding protective effects of tools or...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C09K3/14B24B37/00C09G1/02C10M173/02H01L21/304C10M129/32C10M129/52C10M133/08C10N40/22
CPCB24B37/00C09G1/02C09K3/14C10M129/32C10M129/52C10M133/08C10M173/02H01L21/304
Inventor 高梨慎也会田圭佑高桥桂
Owner PALACE CHEM
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