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Spraying device

A technology of spraying device and spraying room, which is applied in spraying device, spraying device with movable outlet, optics, etc., which can solve the problems of uneven spraying of substrates, nozzle clogging, spraying deviation, etc., and avoid uneven spraying Phenomenon, ensure spraying, reduce the effect of spraying deviation

Active Publication Date: 2019-11-05
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, in the cleaning chamber (EUV), etching chamber (ETCH) and water washing unit (SWR), a fixed spray device is used to spray the substrate, because the cleaning chamber (EUV) and water washing unit (SWR) will rinse Remove impurities, etchant liquid crystallization will occur in the etching chamber (ETCH), so the nozzle on the spraying device will be blocked during the production process, or other reasons will cause spraying deviation, resulting in uneven spraying of the substrate, resulting in defective products

Method used

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Embodiment Construction

[0032] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Orientation indicated by rear, left, right, vertical, horizontal, top, bottom, inside, outside, clockwise, counterclockwise, etc. The positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, Therefore, it should not be construed as limiting the invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature...

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Abstract

The invention provides a spraying device. The spraying device can be used for the production process of liquid crystal displays, is arranged in a spraying room and comprises an upper rack, a connection frame, an eccentric wheel and a motor. The eccentric wheel comprises a center hole, a plurality of eccentric holes and connection rods. The center hole and the eccentric wheel are fixedly connected.The eccentric holes are formed in the eccentric wheel. The connection rods are fixedly installed at the eccentric holes and are sleeved with rockers, and rotatable connection is achieved. The motor drives the eccentric wheel to rotate. The connection rods rotate along with the eccentric wheel to drive the rockers to achieve the effect that the upper rack does reciprocating motion. The spraying rack is driven to do reciprocating motion for spraying, thereby swinging at different scopes from 30 degrees to 60 degrees, the phenomenon of uneven spraying of a base plate due to plugging of individual nozzles can be avoided effectively, thus even spraying of the base plate is ensured, spraying deviation is reduced, the base plate is sprayed evenly, and production efficiency and product quality are improved.

Description

technical field [0001] The invention relates to the technical field of microelectronic processing equipment, in particular to a spray device used in the production process of liquid crystal displays. Background technique [0002] In the field of display technology, flat panel display devices such as Liquid Crystal Display (LCD) and Organic Light Emitting Diode (OLED) have gradually replaced Cathode Ray Tube (CRT) displays. [0003] The LCD display device is composed of a thin film transistor array substrate (Thin Film Transistor Array Substrate, TFT Array Substrate) and a color filter (Color Filter, CF) substrate, and liquid crystal is poured between the TFT substrate and the CF substrate. , through electrification or not to control the liquid crystal molecules to change direction, and refract the light from the backlight module to produce a picture. [0004] In the TFT-LCD manufacturing process, ITO (Indium Tin Oxide, Indium Tin Oxide) is widely used to make transparent di...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B3/02
CPCB08B3/024G02F1/1303B05B3/14G02F1/1316G02F1/133792
Inventor 陈建锋
Owner WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD