Preparation method of diffraction grating waveguide for near-eye display

Abstract

The application discloses a preparation method of a diffraction grating waveguide of a near-eye display by using a nano imprinting technology, and belongs to the technical field of near-eye displaying. The problems that the diffraction grating waveguide in the prior art is large in preparation difficulty, low in yield and poor in repeatability and cannot achieve large-scale production. The preparation method of the application includes the following steps that an imprinting template with a diffraction grating waveguide pattern is prepared; the diffraction grating waveguide pattern of the imprinting template is transferred to a transfer template through a nano imprinting process, and the transfer template having an inverse pattern of the diffraction grating waveguide pattern is obtained; the inverse pattern of the diffraction grating waveguide pattern of the imprinting template is transferred to a waveguide substrate through the nano imprinting process, and the diffraction grating waveguide of the near-eye display is obtained. The preparation method can be used for preparation of the diffraction grating waveguide of the near-eye display.

Description

technical field [0001] The present application relates to a near-eye display technology, in particular to a method for preparing a near-eye display diffraction grating waveguide using nanoimprint technology. Background technique [0002] Augmented Reality (AR) is an innovation in visual experience and human-computer interaction, and a new technology that "seamlessly" integrates real world information and virtual world information. [0003] The near-eye display is a key component of augmented reality technology. There are mainly three modes: prism, free-form surface, and diffraction grating waveguide. Among them, the prism method has a very small field of view and a large thickness, which cannot meet the needs of large-scale industrialization; although the free-form surface method has a large field of view, it is difficult to process and design the curved surface, and the volume is heavy, so it cannot be lightweight and portable. For the display technology of diffraction gra...

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Problems solved by technology

[0005] In view of the above analysis, this application aims to provide a method for preparing a diffraction grating waveguide for a near-eye display using a nanoimprint process, which solves the problem of difficulty in the preparation of a diffraction grating waveguide in the prior art, low yield, poor repeatability, and inability to carry out large-scale production. The problem

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