Preparation method of diffraction grating waveguide for near-eye display

A near-eye display and diffraction grating technology, which is applied in the direction of optical waveguide light guides, light guides, and optomechanical equipment, can solve the problems of difficult fabrication of diffraction grating waveguides, inability to carry out mass production, poor repeatability, etc., and achieve extended life and processing accuracy High, low-cost effect

Pending Publication Date: 2019-11-05
THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA +1
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[0005] In view of the above analysis, this application aims to provide a method for preparing a diffraction grating waveguide for a near-eye display using a nanoimprint process, which solves

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  • Preparation method of diffraction grating waveguide for near-eye display
  • Preparation method of diffraction grating waveguide for near-eye display
  • Preparation method of diffraction grating waveguide for near-eye display

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[0033] Hereinafter, preferred embodiments of the present application will be described in detail with reference to the accompanying drawings, where the accompanying drawings constitute a part of the present application and are used together with the embodiments of the present application to explain the principle of the present application.

[0034] In order to better understand the diffraction grating waveguide, the diffraction grating waveguide is introduced below. The diffraction grating waveguide of the near-eye display mainly includes the incident grating and the exit grating, and some can also include the turning grating, see figure 1 . The so-called diffraction grating waveguide pattern refers to a pattern having a grating structure corresponding to the diffraction grating waveguide (incident grating and output grating, or incident grating, output grating, and turning grating).

[0035] This application provides a method for preparing a diffraction grating waveguide for a near...

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Abstract

The application discloses a preparation method of a diffraction grating waveguide of a near-eye display by using a nano imprinting technology, and belongs to the technical field of near-eye displaying. The problems that the diffraction grating waveguide in the prior art is large in preparation difficulty, low in yield and poor in repeatability and cannot achieve large-scale production. The preparation method of the application includes the following steps that an imprinting template with a diffraction grating waveguide pattern is prepared; the diffraction grating waveguide pattern of the imprinting template is transferred to a transfer template through a nano imprinting process, and the transfer template having an inverse pattern of the diffraction grating waveguide pattern is obtained; the inverse pattern of the diffraction grating waveguide pattern of the imprinting template is transferred to a waveguide substrate through the nano imprinting process, and the diffraction grating waveguide of the near-eye display is obtained. The preparation method can be used for preparation of the diffraction grating waveguide of the near-eye display.

Description

technical field [0001] The present application relates to a near-eye display technology, in particular to a method for preparing a near-eye display diffraction grating waveguide using nanoimprint technology. Background technique [0002] Augmented Reality (AR) is an innovation in visual experience and human-computer interaction, and a new technology that "seamlessly" integrates real world information and virtual world information. [0003] The near-eye display is a key component of augmented reality technology. There are mainly three modes: prism, free-form surface, and diffraction grating waveguide. Among them, the prism method has a very small field of view and a large thickness, which cannot meet the needs of large-scale industrialization; although the free-form surface method has a large field of view, it is difficult to process and design the curved surface, and the volume is heavy, so it cannot be lightweight and portable. For the display technology of diffraction gra...

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Application Information

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IPC IPC(8): G02B6/12G02B6/13G03F7/00G02B27/01
CPCG02B6/12004G02B6/13G03F7/0002G02B27/0101G02B2006/12166B29C33/3842G02B5/1857G03F7/0005G03F7/70483G02B6/124G03F7/00G03F7/0015G03F7/0017G03F7/0035G03F7/2012
Inventor 李晓军
Owner THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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