Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Electrode shape regulatable CMUTs (capacitive micromachined ultrasonic transducers) with high ultrasonic transceiving performance

An electrode shape and superb technology, applied in the direction of the fluid using vibration, can solve the problems of reducing the spatial range of film motion, film thickness uniformity, unit structure consistency, increasing the complexity of the preparation process, etc., to achieve ultrasonic emission intensity and reception. The sensitivity, ultrasonic emission intensity and ultrasonic receiving sensitivity are improved, and the consistency is good.

Active Publication Date: 2019-11-12
XI AN JIAOTONG UNIV +1
View PDF5 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The above designs can improve the transmitting and receiving performance of the CMUT to a certain extent, but the complex film structure will reduce the space range of the film movement, the uniformity of the film thickness and the consistency of the unit structure, and increase the complexity of the preparation process

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Electrode shape regulatable CMUTs (capacitive micromachined ultrasonic transducers) with high ultrasonic transceiving performance
  • Electrode shape regulatable CMUTs (capacitive micromachined ultrasonic transducers) with high ultrasonic transceiving performance
  • Electrode shape regulatable CMUTs (capacitive micromachined ultrasonic transducers) with high ultrasonic transceiving performance

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0022] The present invention is described in detail below in conjunction with accompanying drawing and embodiment:

[0023] Referring to Fig. 1(a) and Fig. 1(b), the overall structure of the high ultrasonic transceiving performance CMUTs regulated by the electrode shape of the present invention includes, from top to bottom, a hollow electrode 2, a suspended film 1, a cavity 3, a lower electrode insulating layer 5 and The lower electrode 6, the hollow electrode 2 is used as the upper electrode, the central area of ​​the hollow electrode 2 is provided with a through hole 2-1 through the thickness of the electrode, the central axis of the through hole 2-1 coincides with the central axis of the cavity 3; the suspended film 1 Together with the hollow electrodes 2, the vibrating membrane of CMUTs is formed, the cavity 3 is surrounded by pillars 4, and the hollow electrodes 2 of each CMUTs unit are connected by electrode connecting lines 7.

[0024] Referring to the embodiment shown ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses electrode shape regulatable CMUTs (capacitive micromachined ultrasonic transducers) with high ultrasonic transceiving performance. Upper electrodes of conventional CMUTs are round or polygonal, and at least cover the central area of a suspended thin film; different from upper electrode structures of the conventional CMUTs, the CMUTs are characterized in that through holes are formed in central areas of hollow electrodes of the CMUTs, and the central area of the suspended thin film is not covered with the electrodes. According to the hollow electrode design, the rigidityof the center of the suspended thin film and the thin film area fixedly supported between support column areas can be reduced by the electrostatic softening effect, the rigidity of the central area of the thin film keeps unchanged, so that the suspended thin film produces piston-like vibration, average displacement of the whole suspended thin film is increased, and emission intensity and receiving sensitivity of ultrasonic waves are improved. According to the CMUTs with the hollow electrodes, the problem of mutual restriction of ultrasonic emission and receiving performance of the conventional CMUTs is solved, simultaneous improvement of ultrasonic emission and receiving performance can be realized effectively, besides, the structure and the process are simple, and the CMUTs can be applied to the air coupling application fields of ultrasonic biometric identification, 3D ultrasonic posture recognition and the like.

Description

technical field [0001] The invention relates to MEMS ultrasonic transducer technology, in particular to CMUTs with high ultrasonic transceiving performance regulated by electrode shape. Background technique [0002] Capacitive Micromachined Ultrasonic Transducers (CMUTs) are superior to traditional PZT ultrasonic transducers in terms of electromechanical coupling coefficient, fluid impedance matching, bandwidth, operating temperature range, and two-dimensional transducer array preparation. Therefore, it has become a new generation of ultrasonic transducers that can replace traditional ultrasonic transducers, and has received widespread attention. In the past 20 years or so, CMUTs have been widely used in the fields of 3D ultrasonic imaging, ultrasonic nondestructive testing, underwater ultrasound, and ultrasonic therapy. Experimental research results have shown the feasibility and performance advantages of CMUTs in practical applications. In recent years, the rapid developm...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): B06B1/02
CPCB06B1/0207B06B1/0292B06B2201/51B06B2201/52
Inventor 李支康赵立波李杰郭帅帅胡开明张文明徐廷中赵一鹤刘子晨蒋庄德
Owner XI AN JIAOTONG UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com