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Mechanical grinding process of high-precision single crystal diamond conical pressure head

A single crystal diamond, mechanical grinding technology, applied in the direction of grinding devices, grinding machine tools, metal processing equipment, etc., to achieve low cost, high precision, and reduce adverse effects

Active Publication Date: 2019-11-12
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, most high-precision diamond tools and micro-tools are manufactured by mechanical grinding. For the processing method of high-precision diamond indenters, foreign diamond tool manufacturers regard it as a commercial secret, and there are few reports on the materials and literature related to related processes. In China, there are only relevant studies on the design and processing of pyramidal indenters.

Method used

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  • Mechanical grinding process of high-precision single crystal diamond conical pressure head
  • Mechanical grinding process of high-precision single crystal diamond conical pressure head
  • Mechanical grinding process of high-precision single crystal diamond conical pressure head

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specific Embodiment approach 1

[0031] Specific implementation mode one: as Figure 1 to Figure 7 As shown, the invention discloses a mechanical grinding process of a high-precision single crystal diamond conical indenter, comprising the following steps:

[0032] Step 1: Preparation of single crystal diamond crystal blank, select regular octahedral natural diamond material, determine the axis direction of the indenter, use a laser cutting machine to cut the single crystal diamond crystal blank along the direction perpendicular to the axis of the indenter, and then figure 1 The cutting surface of the single crystal diamond crystal blank is ground to a single crystal diamond crystal by using 800# bronze diamond grinding wheel disc on the diamond tool grinding machine shown;

[0033]Step 2: Welding of single crystal diamond indenter, choose low thermal expansion coefficient (≤1.5×10 -6 / K) Invar material is used as the indenter shank, and the single crystal diamond crystal is welded on the end of the indenter ...

specific Embodiment approach 2

[0044] Embodiment 2: This embodiment is a further description of Embodiment 1. In the first step, the axis direction of the indenter determined by the single crystal diamond crystal blank is selected as the crystal orientation direction.

specific Embodiment approach 3

[0045] Specific embodiment three: This embodiment is a further description of specific embodiment two. In the step three, the cone tip angle of the single crystal diamond indenter grinding and processing the conical surface is set to 100°, and the grinding angle is set to 120°. °.

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Abstract

The invention discloses a mechanical grinding process of a high-precision single crystal diamond conical pressure head, and belongs to the technical field of manufacturing of high-precision nano indentation pressure heads. The process comprises the steps of cutting a single crystal diamond crystal blank, and grinding and flattening a cutting surface to prepare a single crystal diamond crystal; welding the single crystal diamond crystal at the end part of a pressure head handle to obtain a single crystal diamond pressure head; rounding the tip of the single crystal diamond pressure head to prepare a single crystal diamond conical pressure head; performing rough machining on the conical surface; performing precision finishing of a cast iron grinding disc and coating of diamond grinding paste; stabilizing the performance state of a diamond cutter grinder; performing primary finish machining on the conical surface; performing primary finish machining on the surface of the ball head; adjusting the rotation axis position of a clamp to coincide with the rotation center of a swing shaft; performing secondary finish machining on the conical surface; performing secondary finish machining onthe surface of the ball head; and detecting by using an atomic force microscope to judge whether the processing is qualified. The operation is simple, the cost is low, and the high-precision single crystal diamond conical pressure head can be obtained.

Description

technical field [0001] The invention belongs to the technical field of manufacturing high-precision nano-indentation indenters, in particular to a mechanical grinding process for high-precision single-crystal diamond conical indenters. Background technique [0002] With the continuous advancement of the scientific and technological level of human society, the rapid development of MEMS manufacturing technology, bioengineering and thin film technology has put forward new requirements for the detection technology of mechanical properties of materials. plays a vital role in. Nanoindentation technology is an important technology for detecting the micromechanical properties of materials. Its main detection principle is to press a spherical or conical indenter into the surface of the material to be tested, and continuously record the indentation load and The indentation depth is used to characterize the micro-mechanical properties of the material by analyzing the load-displacement...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B37/005B24B37/025B24B49/12B24B57/04B24B53/017
CPCB24B37/005B24B37/025B24B49/12B24B53/017B24B57/04
Inventor 宗文俊吴立强吴兵崔志鹏
Owner HARBIN INST OF TECH