Method for improving surface figure accuracy of FIBM (focused ion beam milling) three-dimensional microstructure

Abstract

The invention discloses a method for improving the surface figure accuracy of a FIBM (focused ion beam milling) three-dimensional microstructure. According to the method, an accurate FIBM simulation model is established, simulation machining is carried out by utilizing an original designed gray-scale image, the contour error of each simulation round is calculated, when the contour error reaches apreset value, simulation is stopped, the contour error at the moment and the corresponding simulation machining round are recorded, the simulation machining round is taken as the machining round of the input gray-scale image, the steps are repeated, a plurality of contour error correction gray-scale images and corresponding manufacturing rounds are acquired, and FIBM (focused ion beam milling) actual machining is guided. The method has the advantages that the defect of large surface figure deviation existing in the traditional FIBM (focused ion beam milling) gray-scale image machining processcan be overcome, the FIBM (focused ion beam milling) gray-scale image high-precision machining three-dimensional microstructure is achieved, and the method is suitable for FIBM (focused ion beam milling) machining of different shapes, different scales and different materials and has extremely high application and popularization values in the field of micro-nano machining.

Description

technical field [0001] The invention relates to the field of micro-nano processing, in particular to a method for improving the precision of three-dimensional microstructure surface shape in focused ion beam milling. Background technique [0002] Focused ion beam milling (FIBM) processing technology accelerates and focuses the ions emitted by the liquid metal ion source through the lens system and then bombards the surface of the material. After the ions bombard the surface of the sample, the energy will be transferred to the atoms of the sample material through collision. , when the energy of material atoms reaches a certain threshold, it will cause surface particles to exit, thus completing the material removal process. Its lens system can control the beam spot size of the ion beam, so as to realize the removal of materials in different scales (nanometer to micron), and the image controller can control the scanning trajectory and residence time of the ion beam, so as to re...

AI Technical Summary

Problems solved by technology

Using the traditional FIBM grayscale image to process three-dimensional microstructures results in a significant reduction in surface shape accuracy due to the following phenomena:

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