Novel TFT device structure and manufacturing method thereof
A device structure and manufacturing method technology, applied in the field of microelectronics, can solve the problems affecting the process yield, etc., and achieve the effects of reducing the probability of light leakage, increasing the aperture ratio, and improving the brightness of the picture
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Embodiment 1
[0048] Please refer to figure 1 , Embodiment 1 of the present invention is:
[0049] A new type of TFT device structure, including a substrate 1, on the surface of the substrate 1, a semiconductor layer 2, a first insulating layer 3, a flat layer 4, a second insulating layer 5, a third insulating layer 6 and a transparent conductive layer 7 are sequentially stacked , the vertical section of the flat layer 4 is stepped, and the order of the flat layer 4 is 2-5 layers, preferably 3 layers;
[0050] A via hole is opened on the first insulating layer 3, the via hole is set corresponding to the semiconductor layer 2, and the via hole is symmetrical to the axisymmetric center of the semiconductor layer 2, and the via hole is filled with the The third insulating layer 6 and the transparent conductive layer 7, the third insulating layer 6 is in contact with the semiconductor layer 2, the first insulating layer 3 and the flat layer 2 respectively, and the transparent conductive layer ...
Embodiment 2
[0053] Please refer to figure 2 , the second embodiment of the present invention is:
[0054] A method for manufacturing a novel TFT device structure, comprising the following steps:
[0055] S1, providing a substrate 1, and covering the semiconductor layer 2 on the substrate 1;
[0056] S2, forming a first insulating layer 3, and covering the surface of the semiconductor layer 2;
[0057]S3, forming a via hole in the first insulating layer 3;
[0058] S4, forming a flat layer 4 and covering the surface of the first insulating layer 3;
[0059] Step S4 is specifically:
[0060] Place the photomask above the first insulating layer 3, and irradiate the upper surface of the photomask with ultraviolet light to form a stepped flat layer 4, and the flat layer 4 covers the surface of the first insulating layer 3;
[0061] The mask is a half-tone mask, and the number of steps of the flat layer 4 formed by using half-tone masks with different light transmittances is different, an...
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