A high-speed electromagnetic polishing device for complex curved surfaces with small and medium diameters

Abstract

The invention discloses a high-speed electromagnetic polishing device for complex curved surfaces with small and medium calibers. The device includes a sealed container composed of a container body and an upper cover. An object stage is installed in the container body for placing optical elements to be polished; the upper cover It is conformal to the surface to be polished and has a gap; the sealed container is provided with a magnetorheological fluid circulation port, which is connected to the magnetorheological fluid circulation pipeline; the sealed container is filled with magnetorheological fluid; it is used for a controllable magnetic field generating device A position-variable electromagnetic field is generated at the upper cover, so that the magnetorheological fluid between the upper cover and the surface to be polished at the position where the electromagnetic field is generated forms a Birmingham body as a flexible grinding head; by controlling the position change of the electromagnetic field, the flexible grinding head Polish optics by sliding across the surface to be polished. The invention can effectively and quickly polish the complex curved surface with small and medium calibers, thereby effectively shortening the time of the optical modification stage and improving the optical processing efficiency.

Description

technical field [0001] The invention is mainly used in the technical field of optical processing, and is especially suitable for using magnetorheological fluid to quickly polish silicon carbide, silicon, fused quartz, ULE and other materials with small and medium-sized complex curved surface optical elements. Background technique [0002] In ultra-precise space and ground imaging optical systems, it is often necessary to use various complex curved surfaces with small and medium diameters, such as aspheric surfaces with high steepness and large deviation, and free-form surfaces without analytical expression. The application of this complex curved surface has greatly improved the performance of the optical system, but at the same time it has also brought great difficulties to ultra-precision optical processing, especially in the transition stage from precision grinding to rough polishing. Due to the low surface roughness of the optical components, they cannot effectively enter...

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Problems solved by technology

This intermediate process will consume a lot of time and directly reduce the efficiency of optical processing

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