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A kind of preparation method of heater support substrate and preparation method of heater

A technology for supporting substrates and heaters, applied in ohmic resistance heating, heating element materials, ohmic resistance heating parts, etc., can solve the problems of pyrolytic graphite edge layering and heater scrapping, etc., to achieve beautiful patterns and high yield , the effect of increasing economic benefits

Active Publication Date: 2021-01-22
博宇(天津)半导体材料有限公司 +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Existing heaters generally deposit a layer of pyrolytic graphite on the support substrate, and then draw and pattern the pyrolytic graphite. However, processing patterns on the surface of pyrolytic graphite to form patterns is very easy to cause residual damage on the surface of the support substrate. The edge of the pyrolytic graphite is delaminated, as long as this happens, the entire heater will be completely scrapped

Method used

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  • A kind of preparation method of heater support substrate and preparation method of heater
  • A kind of preparation method of heater support substrate and preparation method of heater
  • A kind of preparation method of heater support substrate and preparation method of heater

Examples

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Embodiment 1

[0031] figure 1 It is a schematic structural view of the heater supporting base in Embodiment 1 of the present invention; figure 2 It is a flow chart of the preparation method of the heater supporting base in Example 1 of the present invention.

[0032] Such as figure 1 and figure 2 As shown, the preparation method of the heater support base in this embodiment includes: preparing the base body; processing the base body so that the surface of the base body forms a first region 1 and a second region 2, and the roughness of the first region 1 Degree is greater than the second area 2.

[0033] The roughness of the first region 1 is relatively large, so that the conductive material layer deposited on the first region 1 is not easy to fall off, and the roughness of the second region 2 is small so that the conductive material layer subsequently deposited on the second region 2 is easy to fall off . In this embodiment, by finely controlling the surface roughness of the area cor...

Embodiment 2

[0040] image 3 is a schematic structural view of the heater of Embodiment 2 of the present invention; Figure 4 It is the flowchart of the preparation method of the heater of the embodiment 2 of the present invention.

[0041] Such as image 3 and Figure 4 As shown, this embodiment provides a method for preparing a heater, including: using the method in Example 1 to prepare a heater support base; depositing a conductive material layer on the surface of the heater support base; removing the surface of the second region 2 A conductive material layer; an insulating layer is formed on the surface of the heater supporting base with the conductive material layer to obtain a heater.

[0042] Specifically, forming a conductive layer on the surface of the heater base body includes: mixing the carbon-containing alkane gas and the inert gas into a high-temperature loading furnace; the carbon-containing alkane gas and the inert gas react in the high-temperature loading furnace to gen...

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Abstract

The invention relates to a preparation method of a supporting substrate of a heater and a preparation method of the heater. The preparation method of the supporting substrate of the heater comprises the following steps: preparing a substrate body; and treating the substrate body, wherein a first area and a second area are formed on the surface of the substrate body and the roughness of the first area is greater than that of the second area. According to the preparation method of the heater, by controlling the surface roughness of the first and second areas corresponding to the surface of the supporting substrate of the heater finely an d depositing a conducting material layer to the surface of the supporting substrate of the heater, the conducting material layer is attached to the first area, and a conducting material in the second area can fall off naturally or can be removed by means of simple tools such as a knife, so that the operation is simple and the pattern is attractive. The conducting material layer is order in edge and is not layered, so that the rate of finished products of the heater is high and the economical benefit is increased.

Description

technical field [0001] The invention relates to the technical field of heaters, in particular to a method for preparing a support base of a heater and a method for preparing a heater. Background technique [0002] Existing heaters generally deposit a layer of pyrolytic graphite on the support substrate, and then describe the pyrolytic graphite to make a pattern, but processing patterns on the surface of pyrolytic graphite to form a pattern is very easy to cause residual damage on the surface of the support substrate. The edges of the pyrolytic graphite are delaminated, and as long as this happens, the entire heater will be completely scrapped. Contents of the invention [0003] (1) Purpose of the invention [0004] The object of the present invention is to provide a method for preparing a heater support base and a method for preparing a heater to increase the yield of the heater. [0005] (2) Technical solution [0006] In order to solve the above problems, the present ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/34C23C16/56C23C16/26H05B3/02H05B3/14H05B3/26
CPCC23C16/26C23C16/342C23C16/56H05B3/02H05B3/145H05B3/26
Inventor 何军舫
Owner 博宇(天津)半导体材料有限公司